Abstract

Photons incident to a total internal reflection surface that is also the object plane of a reflected light microscope will tunnel through a submicron gap in the presence of a dielectric sample. Tunneling increases exponentially with sample height for a homogeneous refractive index and is quantified by empirical calibration to a known geometry. Video photometry of the grays scale tunneling image is converted by a three-axis oscilloscope into a real time 3-D topographic image featuring variable perspective. Vertical resolution is detector-limited to less than a nanometer over a field depth, also detector-limited, of ~0.75λ; lateral resolution is enhanced to ~0.29λ. Photon tunneling images of diamond turned surfaces, optical data structures, a polished optical surface, and microlithographic structures are among those presented. Comparison and correlation with other methods for measuring surface topography in this regime are briefly discussed.

© 1990 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (14)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription