Abstract

Peak reflectivity measurements of W/C, Mo/Si, and Mo/B4C multilayer mirrors have been performed using line and synchrotron radiation in the 8–190 Å wavelength range. Short wavelength measurements using a line source were corrected for nonmonochromatic and divergent incident radiation. Reflectivities of Mo/Si mirrors, measured with synchrotron radiation, ranged from 25 to 44% but decreased significantly around the Si absorption edge. Mo/B4C multilayer mirrors were measured that had peak reflectivities from 10 to 25% between 90 and 200 Å and bandpasses as small as 3 Å.

© 1990 Optical Society of America

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