Abstract

The influence of fifth-order spherical aberration in the measurement error in an interferometer system is analyzed. The criterion of the aberration correction and the optimum correction are proposed. The influence of the focusing error and the wave tilt as the adjustment errors are determined. As a practical example, the optimum wave spherical aberration, optimum longitudinal spherical aberration and the error the distribution in the observation field are given.

© 1990 Optical Society of America

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