Abstract

We describe a miniature alignment stage designed for use with semiconductor diode laser and lenslet arrays. The device achieves 0.03-mrad angular and 0.3-μm linear precision utilizing metal flexures and piezoelectric transducers in a mechanical arrangement that provides compactness and repeatability not obtainable with other types of components. It has been used successfully to coherently combine output of a linear diode laser array of five elements and can accommodate a 2-D array.

© 1990 Optical Society of America

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