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EUV efficiency of a 6000-grooves mm−1 diffraction grating

Mark Hurwitz, Stuart Bowyer, Jerry Edelstein, Tatsuo Harada, and Toshiaki Kita

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Abstract

We present measurements of the efficiency and large-angle scattering of a very high line density, mechanically ruled, planar, uniform line-space diffraction grating at extreme ultraviolet wavelengths.

© 1990 Optical Society of America

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