Abstract

Described in this short paper is an implementation of the phase shifting technique for computer-aided processing of interference fringes obtained by the moire interferometry method for in-plane displacement measurements or in a similar arrangement used for out-of-plane displacement (flatness) determination. The polarized light approach was selected because of the common path propagation of the interfering beams. The experimental verification is presented.

© 1990 Optical Society of America

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