Abstract

ZnS thin films were deposited with and without ion assisted deposition onto substrates held at temperatures ranging from −120 to 50°C. Effects on chemical and crystalline composition, film microstructure, refractive index, stress, and waveguide losses were investigated. We observed that minimum stress and minimum losses occurred at the same deposition temperature (−50°C) in ZnS films, which also corresponded to a quenching of crystallinity.

© 1989 Optical Society of America

Properties of dielectric coatings produced by ion assisted deposition

Pei-Fu Gu, Yen Ming Chen, Xue Qun Hu, and Jin-Fa Tang
Appl. Opt. 28(16) 3318-3322 (1989)

Ion assisted deposition of thermally evaporated Ag and Al films

Chang Kwon Hwangbo, Linda J. Lingg, John P. Lehan, H. Angus Macleod, John L. Makous, and Sang Yeol Kim
Appl. Opt. 28(14) 2769-2778 (1989)

Investigation of thermal annealing of optical properties and residual stress of ion-beam-assisted TiO₂ thin films with different substrate temperatures

Cheng-Chung Lee, Hsi-Chao Chen, and Cheng-Chung Jaing
Appl. Opt. 45(13) 3091-3096 (2006)

Influence of ion assistance on LaF₃ films deposited by molybdenum boat evaporation

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 51(15) 2865-2869 (2012)

Effect of thermal annealing on the optical properties and residual stress of TiO₂ films produced by ion-assisted deposition

Cheng-Chung Lee, Hsi-Chao Chen, and Cheng-Chung Jaing
Appl. Opt. 44(15) 2996-3000 (2005)