Abstract

A computer-controlled beam monitoring system for KrF excimer lasers was developed for simultaneous measurement of near and far field patterns and pointing stability of the laser beam at a 250 Hz repetition rate. The system and results obtained are described.

© 1989 Optical Society of America

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References

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  1. J. D. Gibbs, “Pyroelectric Laser Beam Diagnostic System,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 203–215 (1987).
  2. D. M. Sough, O. Y. Kwon, “Phase-Shifting, Pulsed-Laser Interferometer,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 174–180 (1987).
  3. EG&G Reticon, Application Notes 121, Sunnyvale, CA 94086. This value is calculated from the saturation light level of 0.5 μJ/ cm2 at a wavelength of 2870 K tungsten with a HA-11 filter. Using the relative responsivity of 0.78 and 0.2057 for this light source and for 250-nm wavelength, respectively, the saturation light level at 250 nm gives 0.19 μJ/cm2.
  4. T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

1987 (2)

J. D. Gibbs, “Pyroelectric Laser Beam Diagnostic System,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 203–215 (1987).

D. M. Sough, O. Y. Kwon, “Phase-Shifting, Pulsed-Laser Interferometer,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 174–180 (1987).

Fujioka, T.

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

Gibbs, J. D.

J. D. Gibbs, “Pyroelectric Laser Beam Diagnostic System,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 203–215 (1987).

Kwon, O. Y.

D. M. Sough, O. Y. Kwon, “Phase-Shifting, Pulsed-Laser Interferometer,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 174–180 (1987).

Matsumi, Y.

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

Obara, M.

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

Ohta, K.

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

Saito, H.

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

Sough, D. M.

D. M. Sough, O. Y. Kwon, “Phase-Shifting, Pulsed-Laser Interferometer,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 174–180 (1987).

Yagi, T.

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

Proc. Soc. Photo-Opt. Instrum. Eng. (2)

J. D. Gibbs, “Pyroelectric Laser Beam Diagnostic System,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 203–215 (1987).

D. M. Sough, O. Y. Kwon, “Phase-Shifting, Pulsed-Laser Interferometer,” Proc. Soc. Photo-Opt. Instrum. Eng. 739, 174–180 (1987).

Other (2)

EG&G Reticon, Application Notes 121, Sunnyvale, CA 94086. This value is calculated from the saturation light level of 0.5 μJ/ cm2 at a wavelength of 2870 K tungsten with a HA-11 filter. Using the relative responsivity of 0.78 and 0.2057 for this light source and for 250-nm wavelength, respectively, the saturation light level at 250 nm gives 0.19 μJ/cm2.

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka, “A Diagnostic System for an Excimer Laser Beam,” in Proceedings, Seventh International Symposium on Gas Flow & Chemical Lasers, Vienna, (1988).

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Figures (7)

Fig. 1
Fig. 1

Measurement system, BS: beam splitter, ND: neutral density filter, L: lens, TR: total reflector, S: image sensor.

Fig. 2
Fig. 2

Distribution of the relative response of pixels.

Fig. 3
Fig. 3

Near and far field patterns of the KrF excimer laser pulse operated at 250 Hz. Left picture: Color coded intensity distribution of the near field (rectangular) and the far field (spot) patterns. Intensity levels corresponding to the colors are shown in the right picture. Right picture: Intensity profile scanned in the direction as indicated by the bar in the left picture.

Fig. 4
Fig. 4

Three-dimensional display of the far and near field intensity distributions.

Fig. 5
Fig. 5

Trace of the peak position of the far field spot at a 250-Hz pulse rate.

Fig. 6
Fig. 6

Vertical (top) and horizontal (bottom) components of the motion of the peak position in Fig. 5.

Fig. 7
Fig. 7

Vertical (top) and horizontal (bottom) components of the motion of the center of gravity.

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