Abstract

A summary of the rapid high resolution full field ellipsometric imaging technique termed dynamic imaging microellipsometry is presented. The theoretical basis of a linear sensitivity coefficient approach to the coupling of individual error sources to ellipsometric absolute error is derived. Numerically computed sensitivity coefficient maps are presented with a discussion of their application to ellipsometric data calibration. An analysis of random error is presented and verified using comparisons between the theoretical estimations and system measurements.

© 1989 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Dynamic imaging microellipsometry: theory, system design, and feasibility demonstration

Ralph F. Cohn, James W. Wagner, and Jerome Kruger
Appl. Opt. 27(22) 4664-4671 (1988)

First results from a dual photoelastic-modulator-based polarimetric camera

David J. Diner, Ab Davis, Bruce Hancock, Sven Geier, Brian Rheingans, Veljko Jovanovic, Michael Bull, David M. Rider, Russell A. Chipman, Anna-Britt Mahler, and Stephen C. McClain
Appl. Opt. 49(15) 2929-2946 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (38)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription