Abstract

We discuss the procedures developed for the production and testing of multilayer x-ray mirrors on large figured optical surfaces. Methods which are generally useful for characterizing the performance of such optics are presented, as well as specific results from the production of a 25-cm diam Ritchey-Chretien telescope for a wavelength of λ = 63.5 Å. The latter is a two-mirror system, which places additional stringent requirements upon the accuracy and quality of the coatings.

© 1989 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
X-ray tests of multilayer coated optics

Leon Golub, Eberhard Spiller, R. J. Bartlett, M. P. Hockaday, D. R. Kania, W. J. Trela, and R. Tatchyn
Appl. Opt. 23(20) 3529-3533 (1984)

Multilayer mirror technology for soft-x-ray projection lithography

D. G. Stearns, R. S. Rosen, and S. P. Vernon
Appl. Opt. 32(34) 6952-6960 (1993)

Atomic scale interface engineering by modulated ion-assisted deposition applied to soft x-ray multilayer optics

Fredrik Eriksson, Naureen Ghafoor, Franz Schäfers, Eric M. Gullikson, Samir Aouadi, Susanne Rohde, Lars Hultman, and Jens Birch
Appl. Opt. 47(23) 4196-4204 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription