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Determination of optical constants by angle scanning reflectometry

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Abstract

Reflectance measurements made on an Fe film over a wide range of angles of incidence are curve-fitted to extract the optical constants n and k. Problems with surface oxide layers are eliminated by making the reflectance measurements through the substrate. The experimental uncertainties of n and k are determined by a rigorous χ2 analysis. The experimentally determined optical constants are found to be considerably larger than values found in the literature.

© 1989 Optical Society of America

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