Abstract

Ion beam interference coating (IBIC) is a sputter-deposition process for multiple layers of optical thin films employing a Kaufman gun. It has achieved coatings of extremely low optical loss and high mechanical strength. It has many potential applications for a wide spectral range. This coating process is described in terms of principle, fabrication procedure, and optical measurements. Some discussions follow the history and outlooks of IBIC with emphasis on how to achieve low loss and on the throughput improvements.

© 1989 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Properties of dielectric coatings produced by ion assisted deposition

Pei-Fu Gu, Yen Ming Chen, Xue Qun Hu, and Jin-Fa Tang
Appl. Opt. 28(16) 3318-3322 (1989)

Removal of a protective coating on Al by ion etching for high reflectance in the far ultraviolet

Juan I. Larruquert and Ritva A. M. Keski-Kuha
Appl. Opt. 47(29) 5253-5260 (2008)

Ion-assisted deposition of optical thin films: low energy vs high energy bombardment

John R. McNeil, Alan C. Barron, S. R. Wilson, and W. C. Herrmann
Appl. Opt. 23(4) 552-559 (1984)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription