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Deposition of optical thin films by pulsed laser assisted evaporation

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Abstract

Thin films of several refractory metal oxides and Ge were deposited by pulsed laser evaporation using a TEA CO2 laser. Films deposited on ambient temperature substrates had a polycrystalline microstructure. Ge films deposited on 300°C substrates were single crystalline. The refractive indices of these films were higher than indices of films deposited by conventional evaporation techniques and were bulk values for HfO2 and ZrO2. The crystalline microstructure and high packing density of the films were attributed to the effect of energetic ions in the laser-induced plasma.

© 1989 Optical Society of America

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