Abstract

Thin films of several refractory metal oxides and Ge were deposited by pulsed laser evaporation using a TEA CO2 laser. Films deposited on ambient temperature substrates had a polycrystalline microstructure. Ge films deposited on 300°C substrates were single crystalline. The refractive indices of these films were higher than indices of films deposited by conventional evaporation techniques and were bulk values for HfO2 and ZrO2. The crystalline microstructure and high packing density of the films were attributed to the effect of energetic ions in the laser-induced plasma.

© 1989 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Thin-film deposition by laser-assisted evaporation

H. Sankur and R. Hall
Appl. Opt. 24(20) 3343-3347 (1985)

Influence of ion assistance on LaF3 films deposited by molybdenum boat evaporation

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 51(15) 2865-2869 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription