Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Stress reduction in ion beam sputtered mixed oxide films

Not Accessible

Your library or personal account may give you access

Abstract

Thin films deposited by ion beam sputtering typically have a high compressive stress. This paper demonstrates that this stress can be reduced by cosputtering two materials. Thin film mixtures of zirconia (ZrO2) and silica (SiO2) were prepared with a range of compositions using ion beam sputtering. The refractive index was found to vary almost linearly with composition. The large stress observed in zirconia films was found to be reduced significantly by the addition of silica.

© 1989 Optical Society of America

Full Article  |  PDF Article
More Like This
Characterization of zirconia– and niobia–silica mixture coatings produced by ion-beam sputtering

Andrius Melninkaitis, Tomas Tolenis, Lina Mažulė, Julius Mirauskas, Valdas Sirutkaitis, Benoit Mangote, Xinghai Fu, Myriam Zerrad, Laurent Gallais, Mireille Commandré, Simonas Kičas, and Ramutis Drazdys
Appl. Opt. 50(9) C188-C196 (2011)

Internal stress and optical properties of Nb2O5 thin films deposited by ion-beam sputtering

Cheng-Chung Lee, Chuen-Lin Tien, and Jin-Cherng Hsu
Appl. Opt. 41(10) 2043-2047 (2002)

Single- and dual-ion-beam sputter deposition of titanium oxide films

Jin-Cherng Hsu and Cheng-Chung Lee
Appl. Opt. 37(7) 1171-1176 (1998)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved