Abstract
We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5–5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silicon multilayer soft x-ray mirror, and (3) a trilayer optical data storage film.
© 1989 Optical Society of America
Full Article | PDF ArticleMore Like This
Naba Kishore Sahoo, Sanjiv Kumar, Raj Bahadur Tokas, Shuvendu Jena, Sudhakar Thakur, and Gundlapally Laxmi Narasimha Reddy
Appl. Opt. 52(10) 2102-2115 (2013)
Keith L. Lewis, I. T. Muirhead, A. M. Pitt, A. G. Cullis, N. G. Chew, A. Miller, and T. J. Wyatt-Davies
Appl. Opt. 28(14) 2785-2791 (1989)
K. H. Guenther
Appl. Opt. 20(20) 3487-3502 (1981)