Abstract

We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5–5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silicon multilayer soft x-ray mirror, and (3) a trilayer optical data storage film.

© 1989 Optical Society of America

Postanalyses of an optical multilayer interference filter using numerical reverse synthesis and Rutherford backscattering spectrometry

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Molecular beam deposition of optical coatings and their characterization

Keith L. Lewis, I. T. Muirhead, A. M. Pitt, A. G. Cullis, N. G. Chew, A. Miller, and T. J. Wyatt-Davies
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Reactive ion assisted deposition of aluminum oxynitride thin films

Chang Kwon Hwangbo, Linda J. Lingg, John P. Lehan, H. Angus Macleod, and F. Suits
Appl. Opt. 28(14) 2779-2784 (1989)