Abstract

Attempts have been made to improve the abrasion resistance of multilayer IR reflection filters of SiO2/TiO2 stacks by forming Al2O3 layers at the interfaces.

© 1989 Optical Society of America

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References

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  1. O. S. Heavens, Optical Properties of Thin Solid Films (Butterworth, London, 1955).
  2. H. A. Macleod, Thin-Film Optical Filters (Macmillan, New York, 1986).
    [CrossRef]
  3. Y. Sawada, Y. Taga, Thin Solid Films 116, L55 (1984).
    [CrossRef]
  4. Y. Sawada, Y. Taga, Thin Solid Films 126, 69 (1985).
    [CrossRef]
  5. J. T. Cox, G. Hass, in Physics of Thin Films, G. Hass, R. E. Thum, Eds. (Academic, New York, 1964).
  6. Y. Kageyama, Y. Taga, in Proceedings, Eighth International Symposium on Plasma Chemistry (Tokyo, 1987), p. 1073.
  7. T. Ohwaki, Y. Taga, Jpn. J. Appl. Phys. 23, 1466 (1984).
    [CrossRef]
  8. T. Ohwaki, Y. Taga, Surf. Sci. 157, L308 (1985).
    [CrossRef]

1985

Y. Sawada, Y. Taga, Thin Solid Films 126, 69 (1985).
[CrossRef]

T. Ohwaki, Y. Taga, Surf. Sci. 157, L308 (1985).
[CrossRef]

1984

Y. Sawada, Y. Taga, Thin Solid Films 116, L55 (1984).
[CrossRef]

T. Ohwaki, Y. Taga, Jpn. J. Appl. Phys. 23, 1466 (1984).
[CrossRef]

Cox, J. T.

J. T. Cox, G. Hass, in Physics of Thin Films, G. Hass, R. E. Thum, Eds. (Academic, New York, 1964).

Hass, G.

J. T. Cox, G. Hass, in Physics of Thin Films, G. Hass, R. E. Thum, Eds. (Academic, New York, 1964).

Heavens, O. S.

O. S. Heavens, Optical Properties of Thin Solid Films (Butterworth, London, 1955).

Kageyama, Y.

Y. Kageyama, Y. Taga, in Proceedings, Eighth International Symposium on Plasma Chemistry (Tokyo, 1987), p. 1073.

Macleod, H. A.

H. A. Macleod, Thin-Film Optical Filters (Macmillan, New York, 1986).
[CrossRef]

Ohwaki, T.

T. Ohwaki, Y. Taga, Surf. Sci. 157, L308 (1985).
[CrossRef]

T. Ohwaki, Y. Taga, Jpn. J. Appl. Phys. 23, 1466 (1984).
[CrossRef]

Sawada, Y.

Y. Sawada, Y. Taga, Thin Solid Films 126, 69 (1985).
[CrossRef]

Y. Sawada, Y. Taga, Thin Solid Films 116, L55 (1984).
[CrossRef]

Taga, Y.

Y. Sawada, Y. Taga, Thin Solid Films 126, 69 (1985).
[CrossRef]

T. Ohwaki, Y. Taga, Surf. Sci. 157, L308 (1985).
[CrossRef]

T. Ohwaki, Y. Taga, Jpn. J. Appl. Phys. 23, 1466 (1984).
[CrossRef]

Y. Sawada, Y. Taga, Thin Solid Films 116, L55 (1984).
[CrossRef]

Y. Kageyama, Y. Taga, in Proceedings, Eighth International Symposium on Plasma Chemistry (Tokyo, 1987), p. 1073.

Jpn. J. Appl. Phys.

T. Ohwaki, Y. Taga, Jpn. J. Appl. Phys. 23, 1466 (1984).
[CrossRef]

Surf. Sci.

T. Ohwaki, Y. Taga, Surf. Sci. 157, L308 (1985).
[CrossRef]

Thin Solid Films

Y. Sawada, Y. Taga, Thin Solid Films 116, L55 (1984).
[CrossRef]

Y. Sawada, Y. Taga, Thin Solid Films 126, 69 (1985).
[CrossRef]

Other

J. T. Cox, G. Hass, in Physics of Thin Films, G. Hass, R. E. Thum, Eds. (Academic, New York, 1964).

Y. Kageyama, Y. Taga, in Proceedings, Eighth International Symposium on Plasma Chemistry (Tokyo, 1987), p. 1073.

O. S. Heavens, Optical Properties of Thin Solid Films (Butterworth, London, 1955).

H. A. Macleod, Thin-Film Optical Filters (Macmillan, New York, 1986).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Spectral transmittance of multilayer IR reflection filters. (A) four-layer conventional TiO2/SiO2 filter; (B) seven-layer TiO2/ Al2O3/SiO2 filter before film thickness correction; (C) seven-layer TiO2/Al2O3/SiO2 filter after film thickness correction.

Fig. 2
Fig. 2

Effect of the Al2O3 film thickness on the haze value after 1000 abrasions. The arrow indicates the value for automobile window glass.

Fig. 3
Fig. 3

TEM photographs showing interfacial structures of (a) SiO2/TiO2 and (b) SiO2/Al2O3/TiO2. The arrow indicates the interfaces.

Equations (1)

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H ( % ) = ( T 4 T 2 T 3 T 1 ) × 100 ,

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