Abstract

In interference microscopes requiring oblique incidence illumination (i.e., Michelson, Mirau, and Linnik), the fringe spacing varies with illumination numerical aperture so that calibration is needed for accurate measurements.

© 1989 Optical Society of America

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References

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  1. F. R. Tolmon, Jill G. Wood, “Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 236–238 (1956).
    [CrossRef]
  2. C. F. Bruce, B. S. Thornton, “Obliquity Effects in Interference Microscopes,” J. Sci. Instrum. 34, 203–204 (1956).
    [CrossRef]
  3. J. W. Gates, “Correspondence: Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 507 (1956).
    [CrossRef]
  4. G. Trumpold, “Interference Method of Measuring the Roughness of a Surface,” Izmer. Tekh. 6, 34–36 (1971).

1971 (1)

G. Trumpold, “Interference Method of Measuring the Roughness of a Surface,” Izmer. Tekh. 6, 34–36 (1971).

1956 (3)

F. R. Tolmon, Jill G. Wood, “Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 236–238 (1956).
[CrossRef]

C. F. Bruce, B. S. Thornton, “Obliquity Effects in Interference Microscopes,” J. Sci. Instrum. 34, 203–204 (1956).
[CrossRef]

J. W. Gates, “Correspondence: Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 507 (1956).
[CrossRef]

Bruce, C. F.

C. F. Bruce, B. S. Thornton, “Obliquity Effects in Interference Microscopes,” J. Sci. Instrum. 34, 203–204 (1956).
[CrossRef]

Gates, J. W.

J. W. Gates, “Correspondence: Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 507 (1956).
[CrossRef]

Thornton, B. S.

C. F. Bruce, B. S. Thornton, “Obliquity Effects in Interference Microscopes,” J. Sci. Instrum. 34, 203–204 (1956).
[CrossRef]

Tolmon, F. R.

F. R. Tolmon, Jill G. Wood, “Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 236–238 (1956).
[CrossRef]

Trumpold, G.

G. Trumpold, “Interference Method of Measuring the Roughness of a Surface,” Izmer. Tekh. 6, 34–36 (1971).

Wood, Jill G.

F. R. Tolmon, Jill G. Wood, “Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 236–238 (1956).
[CrossRef]

Izmer. Tekh. (1)

G. Trumpold, “Interference Method of Measuring the Roughness of a Surface,” Izmer. Tekh. 6, 34–36 (1971).

J. Sci. Instrum. (3)

F. R. Tolmon, Jill G. Wood, “Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 236–238 (1956).
[CrossRef]

C. F. Bruce, B. S. Thornton, “Obliquity Effects in Interference Microscopes,” J. Sci. Instrum. 34, 203–204 (1956).
[CrossRef]

J. W. Gates, “Correspondence: Fringe Spacing in Interference Microscopes,” J. Sci. Instrum. 33, 507 (1956).
[CrossRef]

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Figures (2)

Fig. 1
Fig. 1

(a) Normal incidence illumination interference microscope (Fizeau); 1 fringe = λ/2. (b) Oblique incidence illumination interference microscope (Mirau); 1 fringe = λ/2 (obliquity factor).

Fig. 2
Fig. 2

Measured surface heights as a function of N.A. for difference interference microscope objective types.

Tables (1)

Tables Icon

Table I Obliquity Correction Factor for Oblique Incidence Illumination Interferometers

Equations (4)

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1 fringe spacing = λ / 2 .
1 fringe spacing = λ / 2 [ 1 / cos ( α ) ] ,
1 fringe spacing = λ / 2 ln { cos ( β ) / [ cos ( β ) 1 ] } .
1 fringe spacing = λ / 2 { 2 / [ 1 + cos ( β ) ] } ,

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