Abstract

An excimer laser beam has a 1-D Gaussian intensity profile [Ig = A exp(−Y2/σ2)]. The fly’s eye lens composed of cylindrical lenses is designed to convert the Gaussian intensity profile into a uniform intensity profile. Effects of magnification and lens width of the cylindrical lenses on optical efficiency η and uniform intensity width 2Yu are investigated. The cylindrical fly’s eye lens system with η = 82% and Yu = 4σ is obtained by changing each cylindrical lens magnification. An experimental result shows that the cylindrical fly’s eye lens is a useful optical element for redistributing a Gaussian profile.

© 1989 Optical Society of America

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