Abstract
We have developed a math model relating the measured parameters of the Technology Mirror Assembly (TMA) to its final performance. This scalar scattering model is valid for large and small amplitude features. It allows the user to specify power spectral densities and/or autocovariance functions within any spatial bandwidth, including microroughness. We present new TMA data in the bandwidth of ~0.1–1000 mm−1, predicting performance and comparing them with x-ray test data. We also account for assembly, alignment, and particulate contamination. Finally, we comment on improved performance expected after repolishing.
© 1988 Optical Society of America
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Paul Glenn and Andrea Sarnik
Appl. Opt. 27(8) 1534-1538 (1988)
Bernd Aschenbach
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Leon P. Van Speybroeck
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