## Abstract

High throughput grazing incidence mirrors have been fabricated from float glass using a new inexpensive technique. An array of twelve such mirrors including grazing angles from 3 to 15° has been fabricated and tested. Optical measurement of this array shows a line spread function of 6.3-min of arc FWHM with 90% energy enclosed within 13 min of arc. Three-mirror arrays are used to provide 1-D focusing for a diffuse extreme ultraviolet spectrometer. This paper presents the fabrication techniques and testing procedures used, as well as the mirror performance results.

© 1988 Optical Society of America

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### Equations (6)

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(1)
$$z=\frac{{x}^{2}-{p}_{i}^{2}}{2{p}_{i}}.$$
(2)
$$\Delta {x}_{h}\cong \Delta z\phantom{\rule{0.2em}{0ex}}\text{tan}{\theta}_{in}$$
(3)
$$\Delta {x}_{w}\cong \frac{D}{2}\phantom{\rule{0.2em}{0ex}}\text{tan}{\theta}_{in}\phantom{\rule{0.2em}{0ex}}\text{tan}\left({\theta}_{in}+{\text{tan}}^{-1}\frac{D}{2f}\right).$$
(4)
$$\Delta \theta \cong {\left\{{\left(\frac{\Delta z}{f}\text{tan}{\theta}_{in}\right)}^{2}+{\left[\frac{D}{2f}\text{tan}{\theta}_{in}\phantom{\rule{0.2em}{0ex}}\text{tan}\left({\theta}_{in}+{\text{tan}}^{-1}\frac{D}{2f}\right)\right]}^{2}\right\}}^{1/2},$$
(5)
$$\frac{D}{2f}=\frac{1}{2f/\text{No}.}=\text{tan}\left(2{\alpha}_{\text{max}}\right),$$
(6)
$${{z}^{\prime}}^{2}=\left({R}^{2}+{{x}^{\prime}}^{2}\right){\text{sin}}^{2}\u04e8.$$