Abstract

A microlens fabrication process is described which can be used in applications requiring integration of optical elements (lenses) and microcircuits. The process is fully compatible with IC fabrication technology and uses commercially available IC processing materials. The obtained microlenses are of excellent quality and basically show diffraction-limited resolution with ~1-μm spot size. Extensions of the process to production of nonspherical lenses and use of alternative material packages are also discussed.

© 1988 Optical Society of America

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