Abstract

Ray tracing for a planar microlens by solving a ray equation is performed. Off-axial dependence of spot size and wave aberration of fabricated planar microlens samples are estimated. A typical spherical aberration of the present planar microlenses at N.A. = 0.3 was 1.1λ. The curvature field was −0.7λ, and comatic aberration was 0.3λ for a tilted angle of 5° at 0.3 N.A. It was estimated that the field curvature and comatic aberration were dominant next to the spherical aberration.

© 1988 Optical Society of America

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