Abstract

The use of an optical multichannel analyzer in reflectance and transmittance spectrophotometry has been studied. An instrument was developed based on the Shaw-Blevin reflectometer and was capable of collecting optical reflectance and transmittance data at a rate of up to 1024 samples in 17 ins. The accuracy of the apparatus has been assessed by comparison with the measurements made on the same specimens using a commercial spectrophotometer fitted with a Strong reflectometer.

© 1988 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. J. Strong, Procedures in Experimental Physics (Prentice-Hall, New York, 1938), p. 376.
  2. J. E. Shaw, W. R. Blevin, “Instrument for the Absolute Measurement of Direct Spectral Reflectance at Normal Incidence,” J. Opt. Soc. Am. 54, 334 (1964).
    [CrossRef]
  3. S. D. Conte, C. de Boor, Elementary Numerical Analysis: An Algorithmic Approach (McGraw-Hill, New York, 1980), pp. 259–267.
  4. S. B. White, “Evaluation of a Cary Accessory for the Measurement of Optical Constants of Thin Films,” in Varian Instruments at Work, UV-45, 1 (1988).

1988 (1)

S. B. White, “Evaluation of a Cary Accessory for the Measurement of Optical Constants of Thin Films,” in Varian Instruments at Work, UV-45, 1 (1988).

1964 (1)

Blevin, W. R.

Conte, S. D.

S. D. Conte, C. de Boor, Elementary Numerical Analysis: An Algorithmic Approach (McGraw-Hill, New York, 1980), pp. 259–267.

de Boor, C.

S. D. Conte, C. de Boor, Elementary Numerical Analysis: An Algorithmic Approach (McGraw-Hill, New York, 1980), pp. 259–267.

Shaw, J. E.

Strong, J.

J. Strong, Procedures in Experimental Physics (Prentice-Hall, New York, 1938), p. 376.

White, S. B.

S. B. White, “Evaluation of a Cary Accessory for the Measurement of Optical Constants of Thin Films,” in Varian Instruments at Work, UV-45, 1 (1988).

J. Opt. Soc. Am. (1)

Varian Instruments at Work (1)

S. B. White, “Evaluation of a Cary Accessory for the Measurement of Optical Constants of Thin Films,” in Varian Instruments at Work, UV-45, 1 (1988).

Other (2)

J. Strong, Procedures in Experimental Physics (Prentice-Hall, New York, 1938), p. 376.

S. D. Conte, C. de Boor, Elementary Numerical Analysis: An Algorithmic Approach (McGraw-Hill, New York, 1980), pp. 259–267.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1

Layout of the OMA-based apparatus.

Fig. 2
Fig. 2

Curve a: reflectance of a ZrO2/SiO2/ZrO2 multilayer as measured on a Varian 2300; curve b: reflectance of the same specimen as measured on the OMA-based apparatus.

Fig. 3
Fig. 3

Curve a: transmittance of a ZrO2/SiO2/ZrO2 multilayer as measured on a Varian 2300; curve b: transmittance of the same specimen as measured on the OMA-based apparatus.

Fig. 4
Fig. 4

Curve a: reflectance of a Si wafer as measured on a Varian 2300; curve b: reflectance of the same specimen as measured on the OMA-based apparatus; dot c: reflectance of Si from published data.

Fig. 5
Fig. 5

Curve a: reflectance of a Ge film as measured on a Varian 2300; curve b: reflectance of the same specimen as measured on the OMA-based apparatus.

Fig. 6
Fig. 6

Curve a: transmittance of a Ge film as measured on a Varian 2300; curve b: transmittance of the same specimen as measured on the OMA-based apparatus.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

R = I r / I i ; T = I t / I i .
F t c = F c · F t ,
F c = F s c / F s ,

Metrics