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Surface inspection via projection interferometry

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Abstract

Projection fringe interferometry provides a useful technique for nondestructive surface analysis. Two beam interferometric fringes were projected onto a block of aluminum whose surface had various types of grooves cut into it. The fringes were digitized and analyzed via an automatic fringe tracking algorithm. Three-dimensional topographical maps of the surface’s microstructure are presented together with a statistical analysis of surface parameters including average roughness, height distributions, and the autocorrelation function.

© 1988 Optical Society of America

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