Abstract

Mass spectrometry was used to investigate particle emission, specifically contaminant species, as a possible precursor to laser damage. Experiments were carried out in a clean ultrahigh vacuum chamber with background pressure of 4 × 10−8 Pa. Both pulsed (8-ns) and cw Nd:YAG lasers operating at 1.06 μm were used to irradiate a variety of samples, which included uncoated Si, fused silica coated with films of Al2O3, or ZrO2, and bare Si〈111〉. In the pulsed laser experiments, both 1-on-1 and N-on-1 irradiations were investigated. Emitted particles were mass analyzed with a quadruple mass spectrometer. Single pulse damage thresholds found in this study were consistent with those reported in the literature. Important differences are exhibited in pulse radiation data depending on whether the laser fluence is above or below the damage threshold as well as on the type of sample irradiated. In cw laser experiments, fluence was sufficient to cause damage only in the SiO2/ZrO2 multilayered coating due to absorption by the Si substrate. Continuous wave irradiation also resulted in desorption signals at lower intensities than was possible with pulsed radiation.

© 1988 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Mitigation of organic laser damage precursors from chemical processing of fused silica

S. Baxamusa, P.E. Miller, L. Wong, R. Steele, N. Shen, and J. Bude
Opt. Express 22(24) 29568-29577 (2014)

Femtosecond pulse damage thresholds of dielectric coatings in vacuum

Duy N. Nguyen, Luke A. Emmert, Paul Schwoebel, Dinesh Patel, Carmen S. Menoni, Michelle Shinn, and Wolfgang Rudolph
Opt. Express 19(6) 5690-5697 (2011)

Extracting the distribution of laser damage precursors on fused silica surfaces for 351 nm, 3 ns laser pulses at high fluences (20-150 J/cm2)

Ted A. Laurence, Jeff D. Bude, Sonny Ly, Nan Shen, and Michael D. Feit
Opt. Express 20(10) 11561-11573 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription