Abstract

A series of five broadband antireflection coatings on germanium substrates was deposited with or without ion-assisted deposition at a substrate temperature of 220°C. Measurements of laser-damage threshold for 10.6-μm 0.1-μs pulses were made on these coatings. Germanium films deposited under simultaneous argon-ion bombardments show higher laser-damage threshold and substantially better durability of the AR coatings on the germanium substrates.

© 1988 Optical Society of America

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References

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  1. J. A. Dobrowolski, F. Ho, “High Performance Step-Down AR Coatings for High Refractive-Index IR Materials,” Appl. Opt. 21, 288 (1982).
    [CrossRef] [PubMed]
  2. C. L. Nagendra, G. K. M. Thutupalli, “Three-Layer Antireflection Coatings: a New Method for Design and Optimization,” Appl. Opt. 22, 4118 (1983).
    [CrossRef] [PubMed]
  3. C. L. Nagendra, M. Viswanathan, G. K. M. Thutupalli, “Design and Optimization of Low-Loss Wideband Antireflection Coatings for the Visible and Infrared Regions: a New Method,” Appl. Opt. 24, 1156 (1985).
    [CrossRef] [PubMed]
  4. C. M. Kennemore, U. J. Gibson, “Ion Beam Processing for Coating MgF2 onto Ambient Temperature Substrates,” Appl. Opt. 23, 3608 (1984).
    [CrossRef] [PubMed]
  5. P. J. Martin, H. A. Macleod, R. P. Netterfield, C. C. Pacey, W. G. Sainty, “Ion-Beam-Assisted Deposition of Thin Films,” Appl. Opt. 22, 178 (1983).
    [CrossRef] [PubMed]
  6. J. R. McNeil, A. C. Barron, S. R. Wilson, W. C. Hermann, “Ion-Assisted Deposition of Optical Thin Films: Low Energy vs High Energy Bombardment,” Appl. Opt. 23, 552 (1984).
    [CrossRef] [PubMed]
  7. E. H. Hirsch, I. K. Varga, “The Effect of Ion Irradiation on the Adherence of Germanium Films,” Thin Solid Films 52, 445 (1978).
    [CrossRef]
  8. G. A. Al.-Jumaily, L. A. Yazlovitsky, T. A. Mooney, A. Smajkiewicz, “Optical Properties of ThF4 Films Deposited Using Ion-Assisted Deposition,” Appl. Opt. 26, 3752 (1987).
    [CrossRef] [PubMed]
  9. Manufactured by Commonwealth Scientific Corp., Alexandria, VA.
  10. H. A. Macleod, Thin-Film Optical Filters (Macmillan, New York, 1986), Chap. 2.
    [CrossRef]
  11. J. T. Cox, G. Haas, “Protected Al Mirrors with High Reflectance in the 8–12-μm Region from Normal to High Angles of Incidence,” Appl. Opt. 17, 2125 (1978).
    [CrossRef] [PubMed]
  12. Manufactured by Lumonics, Inc., Kanata, Ontario, Canada.

1987

1985

1984

1983

1982

1978

E. H. Hirsch, I. K. Varga, “The Effect of Ion Irradiation on the Adherence of Germanium Films,” Thin Solid Films 52, 445 (1978).
[CrossRef]

J. T. Cox, G. Haas, “Protected Al Mirrors with High Reflectance in the 8–12-μm Region from Normal to High Angles of Incidence,” Appl. Opt. 17, 2125 (1978).
[CrossRef] [PubMed]

Al.-Jumaily, G. A.

Barron, A. C.

Cox, J. T.

Dobrowolski, J. A.

Gibson, U. J.

Haas, G.

Hermann, W. C.

Hirsch, E. H.

E. H. Hirsch, I. K. Varga, “The Effect of Ion Irradiation on the Adherence of Germanium Films,” Thin Solid Films 52, 445 (1978).
[CrossRef]

Ho, F.

Kennemore, C. M.

Macleod, H. A.

Martin, P. J.

McNeil, J. R.

Mooney, T. A.

Nagendra, C. L.

Netterfield, R. P.

Pacey, C. C.

Sainty, W. G.

Smajkiewicz, A.

Thutupalli, G. K. M.

Varga, I. K.

E. H. Hirsch, I. K. Varga, “The Effect of Ion Irradiation on the Adherence of Germanium Films,” Thin Solid Films 52, 445 (1978).
[CrossRef]

Viswanathan, M.

Wilson, S. R.

Yazlovitsky, L. A.

Appl. Opt.

Thin Solid Films

E. H. Hirsch, I. K. Varga, “The Effect of Ion Irradiation on the Adherence of Germanium Films,” Thin Solid Films 52, 445 (1978).
[CrossRef]

Other

Manufactured by Commonwealth Scientific Corp., Alexandria, VA.

H. A. Macleod, Thin-Film Optical Filters (Macmillan, New York, 1986), Chap. 2.
[CrossRef]

Manufactured by Lumonics, Inc., Kanata, Ontario, Canada.

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Figures (4)

Fig. 1
Fig. 1

Schematic of Balzers BAK 760 coating chamber configured for the electron-beam gun and ion-beam gun.

Fig. 2
Fig. 2

Spectrophotometer trace corresponding to the ion-assisted deposition of 10 kÅ of a germanium layer on the zinc selenide substrate.

Fig. 3
Fig. 3

Spectral performance for broadband AR coatings of the three-layer design with the germanium layer only using ion-assisted deposition.

Fig. 4
Fig. 4

Spectral performance for broadband AR coatings of the five-layer design with the germanium layers only using ion-assisted deposition.

Tables (2)

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Table I Physical Film Thicknesses Designed For Broadband AR Coatings

Tables Icon

Table II Environmental Results and Laser-Damage Threshold

Equations (4)

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ψ ( x 1 , x 2 , , x m ) = i = 1 W i T ( λ ) - T i ( λ , x 1 , x 2 , , x m ) 2 d λ ,
T ( λ ) = 4 η 0 Re ( η s ) ( η 0 B + C ) ( η 0 B + C ) * ,
[ B C ] = [ j = 1 [ cos δ j i sin δ j / η j i η j sin δ j cos δ j ] ] [ l η s ] ,
1 ± p x 1 , 2 ± p x 1 , 3 ± p x 1 , , N ± p x 1 ,

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