Abstract

We propose a sinusoidal phase modulating (SPM) interferometer for displacement measurement. The displacement is obtained by processing the detected signal with a microcomputer. The optical configuration of the SPM interferometer is simple because an optical fiber is effectively used to produce sinusoidal phase modulation. The movements of a piezoelectric transducer and the surface profile of a diamond-turned aluminum disk are measured with high accuracy (a few nanometers).

© 1988 Optical Society of America

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