Abstract

Coating experiments were made with reactive low-voltage ion plating to achieve the computer designed performance of all-oxide broadband antireflection systems on BK-7 glass. Reasonable accordance between calculated design and coating experiment as well as reliable production have been demonstrated.

© 1988 Optical Society of America

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References

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  1. H. K. Pulker, Coatings on Glass (Elsevier, Amsterdam, 1984), p. 402; Balzers Application Report, BB 800 016 AE, 8411.
  2. H. K. Pulker, J. Edlinger, M. Buehler, “Ion Plating Optical Films,” in Proceedings, IPAT-87 (CEP Consultants, Ltd., 26 Albany Street, Edinburgh EH1 3QH, U.K., 1987), p. 371.
  3. A. Piegari, G. Emiliani, “Wideband Antireflection Coating Design by the Random Search Approach,” Proc. Soc. Photo-Opt. Instrum. Eng. 652, 64 (1986).
  4. J. Edlinger, M. Buehler, H. K. Pulker, “Quartz Crystal Monitoring in Reactive Ion Plating,” in Proceedings, International Symposium on Trends and New Applications in Thin Films, Strasbourg (17–20 Mar. 1987), p. 735; Supplement, Le Vide, les Couches Minces No. 235 (Janvier–Fevrier1987), p. 735.
  5. H. A. Macleod, Thin Film Optical Filters (Hilger, Ltd., Bristol, 1986), p. 434.

1986 (1)

A. Piegari, G. Emiliani, “Wideband Antireflection Coating Design by the Random Search Approach,” Proc. Soc. Photo-Opt. Instrum. Eng. 652, 64 (1986).

Buehler, M.

H. K. Pulker, J. Edlinger, M. Buehler, “Ion Plating Optical Films,” in Proceedings, IPAT-87 (CEP Consultants, Ltd., 26 Albany Street, Edinburgh EH1 3QH, U.K., 1987), p. 371.

J. Edlinger, M. Buehler, H. K. Pulker, “Quartz Crystal Monitoring in Reactive Ion Plating,” in Proceedings, International Symposium on Trends and New Applications in Thin Films, Strasbourg (17–20 Mar. 1987), p. 735; Supplement, Le Vide, les Couches Minces No. 235 (Janvier–Fevrier1987), p. 735.

Edlinger, J.

H. K. Pulker, J. Edlinger, M. Buehler, “Ion Plating Optical Films,” in Proceedings, IPAT-87 (CEP Consultants, Ltd., 26 Albany Street, Edinburgh EH1 3QH, U.K., 1987), p. 371.

J. Edlinger, M. Buehler, H. K. Pulker, “Quartz Crystal Monitoring in Reactive Ion Plating,” in Proceedings, International Symposium on Trends and New Applications in Thin Films, Strasbourg (17–20 Mar. 1987), p. 735; Supplement, Le Vide, les Couches Minces No. 235 (Janvier–Fevrier1987), p. 735.

Emiliani, G.

A. Piegari, G. Emiliani, “Wideband Antireflection Coating Design by the Random Search Approach,” Proc. Soc. Photo-Opt. Instrum. Eng. 652, 64 (1986).

Macleod, H. A.

H. A. Macleod, Thin Film Optical Filters (Hilger, Ltd., Bristol, 1986), p. 434.

Piegari, A.

A. Piegari, G. Emiliani, “Wideband Antireflection Coating Design by the Random Search Approach,” Proc. Soc. Photo-Opt. Instrum. Eng. 652, 64 (1986).

Pulker, H. K.

H. K. Pulker, Coatings on Glass (Elsevier, Amsterdam, 1984), p. 402; Balzers Application Report, BB 800 016 AE, 8411.

H. K. Pulker, J. Edlinger, M. Buehler, “Ion Plating Optical Films,” in Proceedings, IPAT-87 (CEP Consultants, Ltd., 26 Albany Street, Edinburgh EH1 3QH, U.K., 1987), p. 371.

J. Edlinger, M. Buehler, H. K. Pulker, “Quartz Crystal Monitoring in Reactive Ion Plating,” in Proceedings, International Symposium on Trends and New Applications in Thin Films, Strasbourg (17–20 Mar. 1987), p. 735; Supplement, Le Vide, les Couches Minces No. 235 (Janvier–Fevrier1987), p. 735.

Proc. Soc. Photo-Opt. Instrum. Eng. (1)

A. Piegari, G. Emiliani, “Wideband Antireflection Coating Design by the Random Search Approach,” Proc. Soc. Photo-Opt. Instrum. Eng. 652, 64 (1986).

Other (4)

J. Edlinger, M. Buehler, H. K. Pulker, “Quartz Crystal Monitoring in Reactive Ion Plating,” in Proceedings, International Symposium on Trends and New Applications in Thin Films, Strasbourg (17–20 Mar. 1987), p. 735; Supplement, Le Vide, les Couches Minces No. 235 (Janvier–Fevrier1987), p. 735.

H. A. Macleod, Thin Film Optical Filters (Hilger, Ltd., Bristol, 1986), p. 434.

H. K. Pulker, Coatings on Glass (Elsevier, Amsterdam, 1984), p. 402; Balzers Application Report, BB 800 016 AE, 8411.

H. K. Pulker, J. Edlinger, M. Buehler, “Ion Plating Optical Films,” in Proceedings, IPAT-87 (CEP Consultants, Ltd., 26 Albany Street, Edinburgh EH1 3QH, U.K., 1987), p. 371.

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Figures (4)

Fig. 1
Fig. 1

Spectral reflectance curves of three slightly different all-oxide broadband AR coating designs, each consisting of four alternating layers of TiO2 and SiO2. Between designs 1 and 3 there is a thickness difference in the very thin inner TiO2 layers of ~10%. All designs meet the requirements: R ≤ 1% … 430–690 nm λ; R ≤ 0.5% … 440–660 nm λ; R ≤ 0.25% … 480–630 nm λ.

Fig. 2
Fig. 2

Reproducibility of the refractive index of ion-plated TiO2 films was controlled by transmittance/reflectance measurements of 48 single λ/4 films on glass. Reproducibility was within ±1%.

Fig. 3
Fig. 3

Reflectance vs wavelength curves of two successive runs of ion-plated all-oxide broadband AR coatings for normal incidence on BK-7 glass. The layer thicknesses were chosen according to design number 2.

Fig. 4
Fig. 4

Percentage of the probability for reliable production within the specification R = 0.25% between 480 and 630 nm vs various sets of standard deviations of the four films of different thicknesses.

Tables (2)

Tables Icon

Table I Optical Constants of Films and Glass Substrate

Tables Icon

Table II Physical Thickness d of the Layers in Designs 1–3

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