Abstract

A 2-D symmetric model is incorporated into the calculation of the ellipsometric parameters Ψ and Δ for surface roughness and texture characterization based on the effective medium theory. The least-squares fits of the experimental data at a 5-μm IR wavelength for rough fused silica samples at multiple angles of incidence give the standard deviations of Ψ and Δ of about twice the instrumental errors. The effective thickness and the depolarization factor obtained by ellipsometry agree with the roughness and average height-to-halfwidth ratio of voids obtained by stylus profilometry. The surface texture can be characterized by the fit depolarization factors set. The excellent agreement between theory and experiments indicates that ellipsometry can be a promising nondestructive technique for rough-surface evaluation.

© 1988 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Ellipsometric view on reflection and scattering from optical blacks

Soe-Mie F. Nee
Appl. Opt. 31(10) 1549-1556 (1992)

Roughness measurements of Si and Al by variable angle spectroscopic ellipsometry

Julio R. Blanco and Patrick J. McMarr
Appl. Opt. 30(22) 3210-3220 (1991)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (17)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (32)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription