Abstract

An ultrahigh accuracy 3-D profilometer using a laser heterodyne interferometer has been developed. The profiles of aspheric lenses and their molds have been measured. It can measure not only the rectangular coordinates but also the polar coordinates of the surface profile. The measuring accuracy of each of the three axes is 0.01–0.05 μm if the inclination of the investigated surface is less than ±25°. The accuracy of the polar coordinate measurement is also better than 0.05 μm when the inclination of the aspheric surface is less than ±55°. The dynamic range of the X-Y-Z measurement is 40 × 40 × 20 (mm).

© 1987 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (19)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription