Abstract

Active laser diode interferometers in which the interference signal is fed back to the diode current are investigated for Twyman-Green and self-coupling interferometers. The Twyman-Green interferometer is stabilized with a stabilization factor of more than 100. By using the feedback signal of either type of interferometer, displacement is measured in a linear scale over a dynamic range of 8–9 μm with a precision of 10–60 nm. The feedback signal vs displacement shows hysteresis and multistable behavior, in accordance with theoretical results.

© 1987 Optical Society of America

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