Abstract

Holographic interferometry in an electron microscope and its phase analysis technique are described. The fringe scanning method is used to gain high sensitivity in phase detection. An example of measuring a magnetic field of a fine particle is presented. The measurement accuracy for median filtering is about 1/70 fringe corresponding to the magnetic flux sensitivity of 6 × 10−17 Wb. Noise reduction techniques are also discussed.

© 1987 Optical Society of America

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