Abstract

The effects of aberrations on the accuracy and repeatability of critical dimension measurements made with an optical microscope are examined theoretically and practically. Aberrations in microscope objectives are studied to determine their effects on the image profiles of narrow (≈2-μm) line objects, such as the geometries on integrated circuits. A diffraction theory model is developed and used to investigate the effects of the primary aberrations. Microscope objectives from different manufacturers are examined, and agreement between the theoretical and practical image intensity profiles is demonstrated. It is concluded that the aberrations in many commercially available objective lenses introduce significant errors into semiconductor geometry measurements.

© 1987 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Aberration measurement of photolithographic lenses by use of hybrid diffractive photomasks

Jinwon Sung, Mahesh Pitchumani, and Eric G. Johnson
Appl. Opt. 42(11) 1987-1995 (2003)

Parametric uncertainty in nanoscale optical dimensional measurements

James Potzick and Egon Marx
Appl. Opt. 51(17) 3707-3717 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (15)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription