Abstract

Two-wavelength phase-shifting interferometry is applied to an interference phase-measuring microscope enabling the measurement of step features. The surface is effectively tested at a synthesized equivalent wavelength λeq = λaλb/|λa − λb| by subtracting phase measurements made at visible wavelengths λa and λb. The rms repeatability of the technique is λ/1000 at the equivalent wavelength. To improve the precision of the data, the phase ambiguities in the single-wavelength data are removed using the equivalent wavelength results to determine fringe orders. When this correction is made, a measurement dynamic range (feature height/rms repeatability) of 104 is obtainable. Results using this technique are shown for the measurement of an optical waveguide and a deeply modulated grating.

© 1987 Optical Society of America

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  1. Y.-Y. Cheng, J. C. Wyant, “Two-Wavelength Phase Shifting Interferometry,” Appl. Opt. 23, 4539 (1984).
    [CrossRef] [PubMed]
  2. Y.-Y. Cheng, J. C. Wyant, “Multiple-Wavelength Phase-Shifting Interferometry,” Appl. Opt. 24, 804 (1985).
    [CrossRef] [PubMed]
  3. K. Creath, Y.-Y. Cheng, J. C. Wyant, “Contouring Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” Opt. Acta 32, 1455 (1985).
    [CrossRef]
  4. K. Creath, J. C. Wyant, “Testing Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” J. Opt. Soc. Am. A 2(13), P58 (1985).
  5. K. Creath, J. C. Wyant, Direct Phase Measurement of Aspheric Surface Contours,” Proc. Soc. Photo-Opt. Instrum. Eng. 645, 101 (1986).
  6. B. Bhushan, J. C. Wyant, C. L. Koliopoulos, “Measurement of Surface Topography of Magnetic Tapes by Mirau Interferometry,” Appl. Opt. 24, 1489 (1985).
    [CrossRef] [PubMed]
  7. J. C. Wyant, K. N. Prettyjohns, “Three-dimensional Surface Metrology Using a Computer-Controlled Noncontact Instrument,” Proc. Soc. Photo-Opt. Instrum. Eng. 661, 292 (1986).
  8. P. Carré, “Installation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mesures,” Metrologia 2, 13 (1966).
    [CrossRef]

1986

K. Creath, J. C. Wyant, Direct Phase Measurement of Aspheric Surface Contours,” Proc. Soc. Photo-Opt. Instrum. Eng. 645, 101 (1986).

J. C. Wyant, K. N. Prettyjohns, “Three-dimensional Surface Metrology Using a Computer-Controlled Noncontact Instrument,” Proc. Soc. Photo-Opt. Instrum. Eng. 661, 292 (1986).

1985

K. Creath, Y.-Y. Cheng, J. C. Wyant, “Contouring Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” Opt. Acta 32, 1455 (1985).
[CrossRef]

K. Creath, J. C. Wyant, “Testing Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” J. Opt. Soc. Am. A 2(13), P58 (1985).

Y.-Y. Cheng, J. C. Wyant, “Multiple-Wavelength Phase-Shifting Interferometry,” Appl. Opt. 24, 804 (1985).
[CrossRef] [PubMed]

B. Bhushan, J. C. Wyant, C. L. Koliopoulos, “Measurement of Surface Topography of Magnetic Tapes by Mirau Interferometry,” Appl. Opt. 24, 1489 (1985).
[CrossRef] [PubMed]

1984

1966

P. Carré, “Installation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mesures,” Metrologia 2, 13 (1966).
[CrossRef]

Bhushan, B.

Carré, P.

P. Carré, “Installation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mesures,” Metrologia 2, 13 (1966).
[CrossRef]

Cheng, Y.-Y.

Creath, K.

K. Creath, J. C. Wyant, Direct Phase Measurement of Aspheric Surface Contours,” Proc. Soc. Photo-Opt. Instrum. Eng. 645, 101 (1986).

K. Creath, J. C. Wyant, “Testing Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” J. Opt. Soc. Am. A 2(13), P58 (1985).

K. Creath, Y.-Y. Cheng, J. C. Wyant, “Contouring Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” Opt. Acta 32, 1455 (1985).
[CrossRef]

Koliopoulos, C. L.

Prettyjohns, K. N.

J. C. Wyant, K. N. Prettyjohns, “Three-dimensional Surface Metrology Using a Computer-Controlled Noncontact Instrument,” Proc. Soc. Photo-Opt. Instrum. Eng. 661, 292 (1986).

Wyant, J. C.

J. C. Wyant, K. N. Prettyjohns, “Three-dimensional Surface Metrology Using a Computer-Controlled Noncontact Instrument,” Proc. Soc. Photo-Opt. Instrum. Eng. 661, 292 (1986).

K. Creath, J. C. Wyant, Direct Phase Measurement of Aspheric Surface Contours,” Proc. Soc. Photo-Opt. Instrum. Eng. 645, 101 (1986).

Y.-Y. Cheng, J. C. Wyant, “Multiple-Wavelength Phase-Shifting Interferometry,” Appl. Opt. 24, 804 (1985).
[CrossRef] [PubMed]

K. Creath, J. C. Wyant, “Testing Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” J. Opt. Soc. Am. A 2(13), P58 (1985).

B. Bhushan, J. C. Wyant, C. L. Koliopoulos, “Measurement of Surface Topography of Magnetic Tapes by Mirau Interferometry,” Appl. Opt. 24, 1489 (1985).
[CrossRef] [PubMed]

K. Creath, Y.-Y. Cheng, J. C. Wyant, “Contouring Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” Opt. Acta 32, 1455 (1985).
[CrossRef]

Y.-Y. Cheng, J. C. Wyant, “Two-Wavelength Phase Shifting Interferometry,” Appl. Opt. 23, 4539 (1984).
[CrossRef] [PubMed]

Appl. Opt.

J. Opt. Soc. Am. A

K. Creath, J. C. Wyant, “Testing Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” J. Opt. Soc. Am. A 2(13), P58 (1985).

Metrologia

P. Carré, “Installation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mesures,” Metrologia 2, 13 (1966).
[CrossRef]

Opt. Acta

K. Creath, Y.-Y. Cheng, J. C. Wyant, “Contouring Aspheric Surfaces Using Two-Wavelength Phase-Shifting Interferometry,” Opt. Acta 32, 1455 (1985).
[CrossRef]

Proc. Soc. Photo-Opt. Instrum. Eng.

K. Creath, J. C. Wyant, Direct Phase Measurement of Aspheric Surface Contours,” Proc. Soc. Photo-Opt. Instrum. Eng. 645, 101 (1986).

J. C. Wyant, K. N. Prettyjohns, “Three-dimensional Surface Metrology Using a Computer-Controlled Noncontact Instrument,” Proc. Soc. Photo-Opt. Instrum. Eng. 661, 292 (1986).

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