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  1. J. H. Bruning, J. E. Gallagher, D. P. Rosenfeld, A. D. White, D. J. Brangaccio, D. R. Herriott, “Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses,” Appl. Opt. 13, 2693 (1974).
    [CrossRef] [PubMed]
  2. J. C. Wyant, “Use of an ac Heterodyne Lateral Shear Interferometer with Real-Time Wavefront Correction Systems,” Appl. Opt. 14, 2622 (1975).
    [CrossRef] [PubMed]
  3. L. M. Frantz, A. A. Sawchuk, W. von der Ohe, “Optical Phase Measurement in Real Time,” Appl. Opt. 18, 3301 (1979).
    [CrossRef] [PubMed]
  4. R. P. Grosso, R. Crane, “Precise Optical Evaluation Using Phase Measuring Interferometric Techniques,” Proc. Soc. Photo-Opt. Instrum. Eng. 192, 65 (1979).
  5. M. Schaham, “Precision Optical Wavefront Measurement,” Proc. Soc. Photo-Opt. Instrum. Eng. 306, 183 (1981).
  6. P. R. Yoder, R. P. Grosso, R. Crane, “Use of Phase-Measuring Interferometry in Quantity Production of High Quality Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 330, 84 (1982).
  7. P. Hariharan, B. F. Oreb, A. J. Leistner, “High-Precision Digital Interferometry: its Application to the Production of an Ultrathin Solid Fabry-Perot Etalon,” Opt. Eng. 23, 294 (1984).
    [CrossRef]
  8. B. Dorband, “Die 3-Interferogramm-Methode Zur Automatischer Streifenauswertung in Rechnergesteurerten Digitalen Zweistrahhnterferometern,” Optik 60, 161 (1982).
  9. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, “Digital Wave-Front Measuring Interferometry: Some Systematic Error Sources,” Appl. Opt. 22, 3421 (1983).
    [CrossRef] [PubMed]
  10. Y-Y. Cheng, J. C. Wyant, “Phase Shifter Calibration in Phase-Shifting Interferometry,” Appl. Opt. 24, 3049 (1985).
    [CrossRef] [PubMed]
  11. P. Hariharan, Optical Interferometry (Academic, New York, 1985), p. 63.

1985 (1)

1984 (1)

P. Hariharan, B. F. Oreb, A. J. Leistner, “High-Precision Digital Interferometry: its Application to the Production of an Ultrathin Solid Fabry-Perot Etalon,” Opt. Eng. 23, 294 (1984).
[CrossRef]

1983 (1)

1982 (2)

P. R. Yoder, R. P. Grosso, R. Crane, “Use of Phase-Measuring Interferometry in Quantity Production of High Quality Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 330, 84 (1982).

B. Dorband, “Die 3-Interferogramm-Methode Zur Automatischer Streifenauswertung in Rechnergesteurerten Digitalen Zweistrahhnterferometern,” Optik 60, 161 (1982).

1981 (1)

M. Schaham, “Precision Optical Wavefront Measurement,” Proc. Soc. Photo-Opt. Instrum. Eng. 306, 183 (1981).

1979 (2)

R. P. Grosso, R. Crane, “Precise Optical Evaluation Using Phase Measuring Interferometric Techniques,” Proc. Soc. Photo-Opt. Instrum. Eng. 192, 65 (1979).

L. M. Frantz, A. A. Sawchuk, W. von der Ohe, “Optical Phase Measurement in Real Time,” Appl. Opt. 18, 3301 (1979).
[CrossRef] [PubMed]

1975 (1)

1974 (1)

Brangaccio, D. J.

Bruning, J. H.

Burow, R.

Cheng, Y-Y.

Crane, R.

P. R. Yoder, R. P. Grosso, R. Crane, “Use of Phase-Measuring Interferometry in Quantity Production of High Quality Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 330, 84 (1982).

R. P. Grosso, R. Crane, “Precise Optical Evaluation Using Phase Measuring Interferometric Techniques,” Proc. Soc. Photo-Opt. Instrum. Eng. 192, 65 (1979).

Dorband, B.

B. Dorband, “Die 3-Interferogramm-Methode Zur Automatischer Streifenauswertung in Rechnergesteurerten Digitalen Zweistrahhnterferometern,” Optik 60, 161 (1982).

Elssner, K.-E.

Frantz, L. M.

Gallagher, J. E.

Grosso, R. P.

P. R. Yoder, R. P. Grosso, R. Crane, “Use of Phase-Measuring Interferometry in Quantity Production of High Quality Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 330, 84 (1982).

R. P. Grosso, R. Crane, “Precise Optical Evaluation Using Phase Measuring Interferometric Techniques,” Proc. Soc. Photo-Opt. Instrum. Eng. 192, 65 (1979).

Grzanna, J.

Hariharan, P.

P. Hariharan, B. F. Oreb, A. J. Leistner, “High-Precision Digital Interferometry: its Application to the Production of an Ultrathin Solid Fabry-Perot Etalon,” Opt. Eng. 23, 294 (1984).
[CrossRef]

P. Hariharan, Optical Interferometry (Academic, New York, 1985), p. 63.

Herriott, D. R.

Leistner, A. J.

P. Hariharan, B. F. Oreb, A. J. Leistner, “High-Precision Digital Interferometry: its Application to the Production of an Ultrathin Solid Fabry-Perot Etalon,” Opt. Eng. 23, 294 (1984).
[CrossRef]

Merkel, K.

Oreb, B. F.

P. Hariharan, B. F. Oreb, A. J. Leistner, “High-Precision Digital Interferometry: its Application to the Production of an Ultrathin Solid Fabry-Perot Etalon,” Opt. Eng. 23, 294 (1984).
[CrossRef]

Rosenfeld, D. P.

Sawchuk, A. A.

Schaham, M.

M. Schaham, “Precision Optical Wavefront Measurement,” Proc. Soc. Photo-Opt. Instrum. Eng. 306, 183 (1981).

Schwider, J.

Spolaczyk, R.

von der Ohe, W.

White, A. D.

Wyant, J. C.

Yoder, P. R.

P. R. Yoder, R. P. Grosso, R. Crane, “Use of Phase-Measuring Interferometry in Quantity Production of High Quality Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 330, 84 (1982).

Appl. Opt. (5)

Opt. Eng. (1)

P. Hariharan, B. F. Oreb, A. J. Leistner, “High-Precision Digital Interferometry: its Application to the Production of an Ultrathin Solid Fabry-Perot Etalon,” Opt. Eng. 23, 294 (1984).
[CrossRef]

Optik (1)

B. Dorband, “Die 3-Interferogramm-Methode Zur Automatischer Streifenauswertung in Rechnergesteurerten Digitalen Zweistrahhnterferometern,” Optik 60, 161 (1982).

Proc. Soc. Photo-Opt. Instrum. Eng. (3)

R. P. Grosso, R. Crane, “Precise Optical Evaluation Using Phase Measuring Interferometric Techniques,” Proc. Soc. Photo-Opt. Instrum. Eng. 192, 65 (1979).

M. Schaham, “Precision Optical Wavefront Measurement,” Proc. Soc. Photo-Opt. Instrum. Eng. 306, 183 (1981).

P. R. Yoder, R. P. Grosso, R. Crane, “Use of Phase-Measuring Interferometry in Quantity Production of High Quality Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 330, 84 (1982).

Other (1)

P. Hariharan, Optical Interferometry (Academic, New York, 1985), p. 63.

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Figures (2)

Fig. 1
Fig. 1

Phase error Δφ with an algorithm using three values of the intensity plotted as a function of φ = (4π/λ)d, where d is the separation of the plates (R = 0.05).

Fig. 2
Fig. 2

Phase error Δφ with an algorithm using four values of the intensity, plotted as a function of φ = (4π/λ)d, where d is the separation of the plates (R = 0.05).

Equations (8)

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I = I 0 [ 2 R ( 1 - cos φ ) 1 + R 2 - 2 R cos φ ] ,
I = I 0 ( 2 R 1 + R 2 ) [ 1 - ( 1 - R 2 ) 1 + R 2 cos φ - ( 2 R 1 + R 2 ) cos 2 φ ] .
tan φ = 2 I 2 - I 3 - I 1 I 3 - I 1 .
I 1 = I 0 ( 1 - A cos φ - B cos 2 φ ) , I 2 = I 0 ( 1 - A sin φ - B sin 2 φ ) , I 3 = I 0 ( 1 + A cos φ - B cos 2 φ ) ,
tan φ = sin φ + ( B / A ) cos 2 φ cos φ .
Δ φ = ( B / A ) cos φ cos 2 φ
I 1 = I 0 ( 1 - A cos φ - B cos 2 φ ) , I 2 = I 0 ( 1 + A sin φ - B sin 2 φ ) , I 3 = I 0 ( 1 + A cos φ - B cos 2 φ ) , I 4 = I 0 ( 1 - A sin φ - B sin 2 φ ) ,
I 2 - I 4 I 3 - I 1 = tan φ ,

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