Abstract

A new transmission ellipsometric method—based on an eight-zone measurement—allows determination of birefringent properties of transparent systems and samples. In addition to well-known magnitudes (relative retardation Δ and polarization-dependent loss ψ) of reflection ellipsometry, two additional magnitudes—orientation of the optical axis φ and pseudoactivity angle ρ—have to be ascertained. With a transmission ellipsometer working automatically on the basis of an eight-zone measuring method we attained resolution and reproducibility which is 1–2 decades better than that of commercial research reflection ellipsometers.

© 1987 Optical Society of America

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