Abstract

Surface relief gratings with 1200, 2400, and 3600 lines/mm on planar SiO2–TiO2 waveguides were fabricated by a combination of a dipcoating method (sol gel process) with an embossing technique. The grating is embossed into a deformable gel film, which by subsequent heat treatment is transformed into an oxide waveguiding film. During the heat treatment the film thickness shrinks to about one-fourth of its value directly after the embossing. Values of the process parameters, e.g., of the embossing pressure, are given with which input and output grating couplers of good quality were fabricated. Measurements of input and output efficiencies are reported; incoupling efficiencies up to ∼28% were obtained.

© 1986 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Replication of micro-optical elements with continuous relief by ultraviolet embossing with thiol-ene-based resist

Peng Jin, Nan Liu, Jie Lin, Jiubin Tan, and Philip D. Prewett
Appl. Opt. 50(21) 4063-4067 (2011)

Thermal embossing of mid-infrared diffractive optical elements by use of a self-processing photopolymer master

Manuel Ornelas-Rodriguez, Sergio Calixto, Yunlong Sheng, and Colette Turck
Appl. Opt. 41(22) 4590-4595 (2002)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (8)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription