Abstract

Inserting an array of nearly 100 similar lenses into a common focal system, the uniformity of the illumination of a target can evidently be improved without being affected by the near-field distribution of laser beams. We report here geometrical- and physical-optics analyses of the lens array and compare them with the experimental results.

© 1986 Optical Society of America

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References

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  1. R. H. Lehmberg, S. P. Obenschain, Opt. Commun. 46, 27 (1983).
    [CrossRef]
  2. Y. Kato, K. Mima, Appl. Phys. B29, 186 (1982).
  3. Y. Kato et al., Phys. Rev. Lett. 53, 1057 (1984).
    [CrossRef]

1984

Y. Kato et al., Phys. Rev. Lett. 53, 1057 (1984).
[CrossRef]

1983

R. H. Lehmberg, S. P. Obenschain, Opt. Commun. 46, 27 (1983).
[CrossRef]

1982

Y. Kato, K. Mima, Appl. Phys. B29, 186 (1982).

Kato, Y.

Y. Kato et al., Phys. Rev. Lett. 53, 1057 (1984).
[CrossRef]

Y. Kato, K. Mima, Appl. Phys. B29, 186 (1982).

Lehmberg, R. H.

R. H. Lehmberg, S. P. Obenschain, Opt. Commun. 46, 27 (1983).
[CrossRef]

Mima, K.

Y. Kato, K. Mima, Appl. Phys. B29, 186 (1982).

Obenschain, S. P.

R. H. Lehmberg, S. P. Obenschain, Opt. Commun. 46, 27 (1983).
[CrossRef]

Appl. Phys.

Y. Kato, K. Mima, Appl. Phys. B29, 186 (1982).

Opt. Commun.

R. H. Lehmberg, S. P. Obenschain, Opt. Commun. 46, 27 (1983).
[CrossRef]

Phys. Rev. Lett.

Y. Kato et al., Phys. Rev. Lett. 53, 1057 (1984).
[CrossRef]

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Figures (14)

Fig. 1
Fig. 1

Configuration of the lens array system.

Fig. 2
Fig. 2

Computational results of intensity distribution on the target: (a) interference pattern of multibeams; (b) Fresnel diffraction by a wide slit; and (c) overlapped.

Fig. 3
Fig. 3

Focal point at target C, 400 μm (single transverse mode He–Ne laser beam).

Fig. 4
Fig. 4

In the target plane C′, the regions illuminated by the various beamlets have different lateral deviations.

Fig. 5
Fig. 5

Focal point at plane C′.

Fig. 6
Fig. 6

Calculated average intensity distribution at plane C′; (a) backward moving distance y = 100 μm, (b) y = 150 μm; and (c) y = 190 μm.

Fig. 7
Fig. 7

When an impediment fence and a lens array are used, uniform illumination is obtained on the target.

Fig. 8
Fig. 8

When an impediment fence is used without a lens array, only a shadow of the impediment fence can be obtained at the same position.

Fig. 9
Fig. 9

Two-dimensional intensity distribution on the target without the lens array.

Fig. 10
Fig. 10

Radial 1-D intensity distribution.

Fig. 11
Fig. 11

Two-dimensional intensity distribution in plane C using the lens array.

Fig. 12
Fig. 12

One-dimensional distribution.

Fig. 13
Fig. 13

Two-dimensional uniform intensity distribution in plane C′ using the lens array.

Fig. 14
Fig. 14

One-dimensional distribution.

Equations (2)

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f = ( F D ) / ( δ M ) ,
d = D / M ,

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