Abstract

Deposition of 0.1–1.0-μm thick metal on a CaF2 coated Si wafer causes a reduction in optical scatter and related microroughness. This effect is not observed when the coated surfaces are examined using a surface profilometer (Talystep). Scanning electron micrographs indicate that coated surfaces are smoother than uncoated surfaces.

© 1986 Optical Society of America

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. J. R. McNeil, W. C. Herrmann, “Ion Beam Applications for Precision Infrared Optics,” J. Vac. Sci. Technol. 20, 324 (1982).
    [CrossRef]
  2. J. R. McNeil, L. J. Wei, G. A. Al-Jumaily, S. Shakir, J. McIver, “Surface Smoothing Effects of Thin Films?,” Appl. Opt. 24, 480 (1985); see also J. R. McNeil, L. J. Wei, J. Casstevens, W. C. Herrmann, J. C. Stover, “Light Scattering Characteristics of Some Metal Surface—A Smoothing Effect?,” in Proceedings, Fifteenth Annual Symposium for Optical Materials for High Power Lasers, Boulder, CO (Nov. 1983).
    [CrossRef] [PubMed]
  3. G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effects of Ion Assisted Deposition on Optical Scatter and Related Microstructure of Thin Films,” J. Vac. Sci. Technol. A3, 651 (1985).
  4. E. L. Church, H. A. Jenkinson, J. M. Zavada, “Relationship Between Surface Scattering and Microtopographic Features,” Opt. Eng. 18, 125 (1979).
    [CrossRef]
  5. H. E. Bennett, “Scattering Characteristics of Optical Materials,” Opt. Eng. 17, 480 (1978).
    [CrossRef]
  6. J. M. Elson, J. M. Bennett, “Relation Between the Angular Dependence of Scattering and the Statistical Properties of Optical Surfaces,” J. Opt. Soc. Am. 69, 31 (1979).
    [CrossRef]
  7. J. M. Bennett, J. H. Dancy, “Stylus Profiling Instrument for Measuring Statistical Properties of Smooth Optical Surfaces,” Appl. Opt. 20, 1785 (1981).
    [CrossRef] [PubMed]
  8. H. E. Bennett, J. M. Bennett, E. J. Ashley, R. J. Motyka, “Verification of the Anamalous-Skin-Effect Theory for Silver in the Infrared,” Phys. Rev. 165, 755 (1968).
    [CrossRef]
  9. Y. Namba, T. Mori, “Cross-sectional Structure of Bi Films and Its Phenominological Analysis,” J. Appl. Phys. 46, 1159 (1975).
    [CrossRef]
  10. G. A. Al-Jumaily, S. R. Wilson, J. R. McNeil, “A Comparison of the Frequency Response of a Mechanical Profilometer and an Optical Scatterometer,” in stray Radiation V, R. P. Breault, Ed., Proc. SPIE 675.

1985 (2)

1982 (1)

J. R. McNeil, W. C. Herrmann, “Ion Beam Applications for Precision Infrared Optics,” J. Vac. Sci. Technol. 20, 324 (1982).
[CrossRef]

1981 (1)

1979 (2)

J. M. Elson, J. M. Bennett, “Relation Between the Angular Dependence of Scattering and the Statistical Properties of Optical Surfaces,” J. Opt. Soc. Am. 69, 31 (1979).
[CrossRef]

E. L. Church, H. A. Jenkinson, J. M. Zavada, “Relationship Between Surface Scattering and Microtopographic Features,” Opt. Eng. 18, 125 (1979).
[CrossRef]

1978 (1)

H. E. Bennett, “Scattering Characteristics of Optical Materials,” Opt. Eng. 17, 480 (1978).
[CrossRef]

1975 (1)

Y. Namba, T. Mori, “Cross-sectional Structure of Bi Films and Its Phenominological Analysis,” J. Appl. Phys. 46, 1159 (1975).
[CrossRef]

1968 (1)

H. E. Bennett, J. M. Bennett, E. J. Ashley, R. J. Motyka, “Verification of the Anamalous-Skin-Effect Theory for Silver in the Infrared,” Phys. Rev. 165, 755 (1968).
[CrossRef]

Al-Jumaily, G. A.

G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effects of Ion Assisted Deposition on Optical Scatter and Related Microstructure of Thin Films,” J. Vac. Sci. Technol. A3, 651 (1985).

J. R. McNeil, L. J. Wei, G. A. Al-Jumaily, S. Shakir, J. McIver, “Surface Smoothing Effects of Thin Films?,” Appl. Opt. 24, 480 (1985); see also J. R. McNeil, L. J. Wei, J. Casstevens, W. C. Herrmann, J. C. Stover, “Light Scattering Characteristics of Some Metal Surface—A Smoothing Effect?,” in Proceedings, Fifteenth Annual Symposium for Optical Materials for High Power Lasers, Boulder, CO (Nov. 1983).
[CrossRef] [PubMed]

G. A. Al-Jumaily, S. R. Wilson, J. R. McNeil, “A Comparison of the Frequency Response of a Mechanical Profilometer and an Optical Scatterometer,” in stray Radiation V, R. P. Breault, Ed., Proc. SPIE 675.

Ashley, E. J.

H. E. Bennett, J. M. Bennett, E. J. Ashley, R. J. Motyka, “Verification of the Anamalous-Skin-Effect Theory for Silver in the Infrared,” Phys. Rev. 165, 755 (1968).
[CrossRef]

Bennett, H. E.

H. E. Bennett, “Scattering Characteristics of Optical Materials,” Opt. Eng. 17, 480 (1978).
[CrossRef]

H. E. Bennett, J. M. Bennett, E. J. Ashley, R. J. Motyka, “Verification of the Anamalous-Skin-Effect Theory for Silver in the Infrared,” Phys. Rev. 165, 755 (1968).
[CrossRef]

Bennett, J. M.

Church, E. L.

E. L. Church, H. A. Jenkinson, J. M. Zavada, “Relationship Between Surface Scattering and Microtopographic Features,” Opt. Eng. 18, 125 (1979).
[CrossRef]

Dancy, J. H.

Elson, J. M.

Herrmann, W. C.

G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effects of Ion Assisted Deposition on Optical Scatter and Related Microstructure of Thin Films,” J. Vac. Sci. Technol. A3, 651 (1985).

J. R. McNeil, W. C. Herrmann, “Ion Beam Applications for Precision Infrared Optics,” J. Vac. Sci. Technol. 20, 324 (1982).
[CrossRef]

Jenkinson, H. A.

E. L. Church, H. A. Jenkinson, J. M. Zavada, “Relationship Between Surface Scattering and Microtopographic Features,” Opt. Eng. 18, 125 (1979).
[CrossRef]

McIver, J.

McNally, J. J.

G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effects of Ion Assisted Deposition on Optical Scatter and Related Microstructure of Thin Films,” J. Vac. Sci. Technol. A3, 651 (1985).

McNeil, J. R.

G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effects of Ion Assisted Deposition on Optical Scatter and Related Microstructure of Thin Films,” J. Vac. Sci. Technol. A3, 651 (1985).

J. R. McNeil, L. J. Wei, G. A. Al-Jumaily, S. Shakir, J. McIver, “Surface Smoothing Effects of Thin Films?,” Appl. Opt. 24, 480 (1985); see also J. R. McNeil, L. J. Wei, J. Casstevens, W. C. Herrmann, J. C. Stover, “Light Scattering Characteristics of Some Metal Surface—A Smoothing Effect?,” in Proceedings, Fifteenth Annual Symposium for Optical Materials for High Power Lasers, Boulder, CO (Nov. 1983).
[CrossRef] [PubMed]

J. R. McNeil, W. C. Herrmann, “Ion Beam Applications for Precision Infrared Optics,” J. Vac. Sci. Technol. 20, 324 (1982).
[CrossRef]

G. A. Al-Jumaily, S. R. Wilson, J. R. McNeil, “A Comparison of the Frequency Response of a Mechanical Profilometer and an Optical Scatterometer,” in stray Radiation V, R. P. Breault, Ed., Proc. SPIE 675.

Mori, T.

Y. Namba, T. Mori, “Cross-sectional Structure of Bi Films and Its Phenominological Analysis,” J. Appl. Phys. 46, 1159 (1975).
[CrossRef]

Motyka, R. J.

H. E. Bennett, J. M. Bennett, E. J. Ashley, R. J. Motyka, “Verification of the Anamalous-Skin-Effect Theory for Silver in the Infrared,” Phys. Rev. 165, 755 (1968).
[CrossRef]

Namba, Y.

Y. Namba, T. Mori, “Cross-sectional Structure of Bi Films and Its Phenominological Analysis,” J. Appl. Phys. 46, 1159 (1975).
[CrossRef]

Shakir, S.

Wei, L. J.

Wilson, S. R.

G. A. Al-Jumaily, S. R. Wilson, J. R. McNeil, “A Comparison of the Frequency Response of a Mechanical Profilometer and an Optical Scatterometer,” in stray Radiation V, R. P. Breault, Ed., Proc. SPIE 675.

Zavada, J. M.

E. L. Church, H. A. Jenkinson, J. M. Zavada, “Relationship Between Surface Scattering and Microtopographic Features,” Opt. Eng. 18, 125 (1979).
[CrossRef]

Appl. Opt. (2)

J. Appl. Phys. (1)

Y. Namba, T. Mori, “Cross-sectional Structure of Bi Films and Its Phenominological Analysis,” J. Appl. Phys. 46, 1159 (1975).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Vac. Sci. Technol. (2)

G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effects of Ion Assisted Deposition on Optical Scatter and Related Microstructure of Thin Films,” J. Vac. Sci. Technol. A3, 651 (1985).

J. R. McNeil, W. C. Herrmann, “Ion Beam Applications for Precision Infrared Optics,” J. Vac. Sci. Technol. 20, 324 (1982).
[CrossRef]

Opt. Eng. (2)

E. L. Church, H. A. Jenkinson, J. M. Zavada, “Relationship Between Surface Scattering and Microtopographic Features,” Opt. Eng. 18, 125 (1979).
[CrossRef]

H. E. Bennett, “Scattering Characteristics of Optical Materials,” Opt. Eng. 17, 480 (1978).
[CrossRef]

Phys. Rev. (1)

H. E. Bennett, J. M. Bennett, E. J. Ashley, R. J. Motyka, “Verification of the Anamalous-Skin-Effect Theory for Silver in the Infrared,” Phys. Rev. 165, 755 (1968).
[CrossRef]

Other (1)

G. A. Al-Jumaily, S. R. Wilson, J. R. McNeil, “A Comparison of the Frequency Response of a Mechanical Profilometer and an Optical Scatterometer,” in stray Radiation V, R. P. Breault, Ed., Proc. SPIE 675.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics