Abstract

In ellipsometry of rough surfaces, the commonly used parameters, psi and delta, are insufficient to characterize completely the changes in polarization state which occur when light is reflected from a rough surface. When an experimentally determined Mueller matrix is available, parameters indicative of depolarization, cross polarization, and change in ellipticity can be found. When the Mueller matrix is regarded as an operator mapping input polarization states depicted on a Poincaré sphere to output states in a similar coordinate system, these new parameters can be illustrated in terms of their effects on the Poincaré sphere. The depolarization and cross polarization parameters correlate with specimen roughness and reflectance.

© 1986 Optical Society of America

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  1. A complete overview of ellipsometry is contained in R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  2. P. S. Hauge, “Mueller Matrix Ellipsometry with Imperfect Compensators,” J. Opt. Soc. Am. 68, 1519 (1978).
    [CrossRef]
  3. R. M. A. Azzam, “Photopolarimetric Measurement of the Mueller Matrix by Fourier Analysis of a Single Detected Signal,” Opt. Lett. 5, 148 (1978).
    [CrossRef]
  4. D. E. Aspnes, “Fourier Transform Detection System for Rotating Analyzer Ellipsometers,” Opt. Commun. 8, 222 (1973).
    [CrossRef]
  5. D. A. Ramsey, “Mueller Matrix Ellipsometry Involving Extremely Rough Surfaces,” Doctoral Dissertation, U. Michigan, Ann Arbor (1985).
  6. R. H. Muller, “Definitions and Conventions in Ellipsometry,” Surf. Sci. 16, 14 (1969).
    [CrossRef]
  7. P. S. Hauge, R. H. Muller, C. G. Smith, “Conventions and Formulas for Using the Mueller-Stokes Calculus in Ellipsometry,” Surf. Sci. 96, 81 (1980).
    [CrossRef]
  8. Ref. 1, p. 491.
  9. Introductory explanations of the Poincaré sphere are contained in the following three books: D. Clark, J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, New York, 1971); W. A. Shurcliff, S. S. Ballard, Polarized Light (Van Nostrand, Princeton, NJ, 1964); W. A. Shurcliff, Polarized Light (Harvard U. P., Cambridge, MA, 1962).
  10. All the experimental Mueller matrices used in this paper were originally published in Ref. 5.

1980 (1)

P. S. Hauge, R. H. Muller, C. G. Smith, “Conventions and Formulas for Using the Mueller-Stokes Calculus in Ellipsometry,” Surf. Sci. 96, 81 (1980).
[CrossRef]

1978 (2)

P. S. Hauge, “Mueller Matrix Ellipsometry with Imperfect Compensators,” J. Opt. Soc. Am. 68, 1519 (1978).
[CrossRef]

R. M. A. Azzam, “Photopolarimetric Measurement of the Mueller Matrix by Fourier Analysis of a Single Detected Signal,” Opt. Lett. 5, 148 (1978).
[CrossRef]

1973 (1)

D. E. Aspnes, “Fourier Transform Detection System for Rotating Analyzer Ellipsometers,” Opt. Commun. 8, 222 (1973).
[CrossRef]

1969 (1)

R. H. Muller, “Definitions and Conventions in Ellipsometry,” Surf. Sci. 16, 14 (1969).
[CrossRef]

Aspnes, D. E.

D. E. Aspnes, “Fourier Transform Detection System for Rotating Analyzer Ellipsometers,” Opt. Commun. 8, 222 (1973).
[CrossRef]

Azzam, R. M. A.

R. M. A. Azzam, “Photopolarimetric Measurement of the Mueller Matrix by Fourier Analysis of a Single Detected Signal,” Opt. Lett. 5, 148 (1978).
[CrossRef]

A complete overview of ellipsometry is contained in R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

Bashara, N. M.

A complete overview of ellipsometry is contained in R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

Clark, D.

Introductory explanations of the Poincaré sphere are contained in the following three books: D. Clark, J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, New York, 1971); W. A. Shurcliff, S. S. Ballard, Polarized Light (Van Nostrand, Princeton, NJ, 1964); W. A. Shurcliff, Polarized Light (Harvard U. P., Cambridge, MA, 1962).

Grainger, J. F.

Introductory explanations of the Poincaré sphere are contained in the following three books: D. Clark, J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, New York, 1971); W. A. Shurcliff, S. S. Ballard, Polarized Light (Van Nostrand, Princeton, NJ, 1964); W. A. Shurcliff, Polarized Light (Harvard U. P., Cambridge, MA, 1962).

Hauge, P. S.

P. S. Hauge, R. H. Muller, C. G. Smith, “Conventions and Formulas for Using the Mueller-Stokes Calculus in Ellipsometry,” Surf. Sci. 96, 81 (1980).
[CrossRef]

P. S. Hauge, “Mueller Matrix Ellipsometry with Imperfect Compensators,” J. Opt. Soc. Am. 68, 1519 (1978).
[CrossRef]

Muller, R. H.

P. S. Hauge, R. H. Muller, C. G. Smith, “Conventions and Formulas for Using the Mueller-Stokes Calculus in Ellipsometry,” Surf. Sci. 96, 81 (1980).
[CrossRef]

R. H. Muller, “Definitions and Conventions in Ellipsometry,” Surf. Sci. 16, 14 (1969).
[CrossRef]

Ramsey, D. A.

D. A. Ramsey, “Mueller Matrix Ellipsometry Involving Extremely Rough Surfaces,” Doctoral Dissertation, U. Michigan, Ann Arbor (1985).

Smith, C. G.

P. S. Hauge, R. H. Muller, C. G. Smith, “Conventions and Formulas for Using the Mueller-Stokes Calculus in Ellipsometry,” Surf. Sci. 96, 81 (1980).
[CrossRef]

J. Opt. Soc. Am. (1)

Opt. Commun. (1)

D. E. Aspnes, “Fourier Transform Detection System for Rotating Analyzer Ellipsometers,” Opt. Commun. 8, 222 (1973).
[CrossRef]

Opt. Lett. (1)

R. M. A. Azzam, “Photopolarimetric Measurement of the Mueller Matrix by Fourier Analysis of a Single Detected Signal,” Opt. Lett. 5, 148 (1978).
[CrossRef]

Surf. Sci. (2)

R. H. Muller, “Definitions and Conventions in Ellipsometry,” Surf. Sci. 16, 14 (1969).
[CrossRef]

P. S. Hauge, R. H. Muller, C. G. Smith, “Conventions and Formulas for Using the Mueller-Stokes Calculus in Ellipsometry,” Surf. Sci. 96, 81 (1980).
[CrossRef]

Other (5)

Ref. 1, p. 491.

Introductory explanations of the Poincaré sphere are contained in the following three books: D. Clark, J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, New York, 1971); W. A. Shurcliff, S. S. Ballard, Polarized Light (Van Nostrand, Princeton, NJ, 1964); W. A. Shurcliff, Polarized Light (Harvard U. P., Cambridge, MA, 1962).

All the experimental Mueller matrices used in this paper were originally published in Ref. 5.

A complete overview of ellipsometry is contained in R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

D. A. Ramsey, “Mueller Matrix Ellipsometry Involving Extremely Rough Surfaces,” Doctoral Dissertation, U. Michigan, Ann Arbor (1985).

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