Abstract

A derivative technique is developed for measuring the material response of photosensitive films. The method consists of recording a low modulated grating superimposed with different uniform preexposures. The modulation of the resulting shallow gratings recorded on the photosensitive film is measured by diffraction techniques and the derivative response is thus computed. Compared with other diffraction-based methods, this one is not affected by nonlinearities. Qualitative visual monitoring of these diffraction data may be used for optimizing materials and processes in photolithography and optical recording. Some experimental results concerning positive and negative photoresists are presented.

© 1985 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription