Properties of TiO<sub>2</sub> and SiO<sub>2</sub> thin films deposited using ion assisted deposition

John R. McNeil; G. A. Al-Jumaily; K. C. Jungling; A. C. Barron

doi:10.1364/AO.24.000486

Properties of TiO₂ and SiO₂ thin films deposited using ion assisted deposition

John R. McNeil, G. A. Al-Jumaily, K. C. Jungling, and A. C. Barron

Applied Optics
Vol. 24,
Issue 4,
pp. 486-489
(1985)
•https://doi.org/10.1364/AO.24.000486

Get Citation
Copy Citation Text
John R. McNeil, G. A. Al-Jumaily, K. C. Jungling, and A. C. Barron, "Properties of TiO₂ and SiO₂ thin films deposited using ion assisted deposition," Appl. Opt. 24, 486-489 (1985)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get PDF (552 KB)
Set citation alerts
Save article

Related Topics
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: June 21, 1984
- Published: February 15, 1985

Not Accessible

Your account may give you access

Abstract

TiO₂ and SiO₂ films deposited using ion assisted deposition are investigated as a function of ion energy and current density. Optical constants, possible ion source contaminants, and optical scatter are examined for samples deposited at ambient (∼75°C) and elevated (∼250°C) substrate temperatures.

Full Article | PDF Article

OSA Recommended Articles

Ion-assisted deposition of optical thin films: low energy vs high energy bombardment

John R. McNeil, Alan C. Barron, S. R. Wilson, and W. C. Herrmann
Appl. Opt. 23(4) 552-559 (1984)

Ion-assisted deposition of TiO₂/SiO₂ multilayers for mass production

Bin Fan, Masahiro Suzuki, and Ken Tang
Appl. Opt. 45(7) 1461-1464 (2006)

Effect of thermal annealing on the optical properties and residual stress of TiO₂ films produced by ion-assisted deposition

Cheng-Chung Lee, Hsi-Chao Chen, and Cheng-Chung Jaing
Appl. Opt. 44(15) 2996-3000 (2005)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

R	= 2–5 Å/sec
T_sub	∼50–100°C (ambient)
T_sub	≃ 250°C (heated)
$J O^{+} / O_{2}^{+}$	= 0–300 μA/cm²
$Γ O^{+} / O_{2}^{+}$	= 0–2 × 10¹⁵ (cm² sec)⁻¹
P_O₂	≃1 × 10⁻⁴ Torr
Γ_O₂	≃ 3 × 10¹⁶ (cm² sec)⁻¹

J μA/cm²	W%	C%	H%	n
T = 250°C
0	0.000	0.79	2.4	2.3
3	0.015	0.82	2.0	2.4
15	0.013	0.97	2.7	2.5
30		4.5	2.4	2.5
T = Ambient (75 ≃ 100°C)
0	0.000	0.15	4.0	2.0^a
3	0.020	0.16	3.5	2.3^a
15	0.040	0.22	2.4	2.3^a

J μA/cm²	W%	C%	H%	Ni%	n
T = 250°C
0	0.000	1.3	3.2	<0.005	2.3
120	0.028	1.4	3.5	<0.005	2.3
240	0.051	1.2	3.4	<0.005	2.4
T = Ambient (∼100°C)
0	0.000	0.22	4.0	<0.005	2.0^a
120	0.040	0.28	3.8	<0.005	2.2

R	= 2–5 Å/sec
T_sub	∼50–100°C (ambient)
T_sub	≃ 250°C (heated)
$J O^{+} / O_{2}^{+}$	= 0–300 μA/cm²
$Γ O^{+} / O_{2}^{+}$	= 0–2 × 10¹⁵ (cm² sec)⁻¹
P_O₂	≃1 × 10⁻⁴ Torr
Γ_O₂	≃ 3 × 10¹⁶ (cm² sec)⁻¹

J μA/cm²	W%	C%	H%	n
T = 250°C
0	0.000	0.79	2.4	2.3
3	0.015	0.82	2.0	2.4
15	0.013	0.97	2.7	2.5
30		4.5	2.4	2.5
T = Ambient (75 ≃ 100°C)
0	0.000	0.15	4.0	2.0^a
3	0.020	0.16	3.5	2.3^a
15	0.040	0.22	2.4	2.3^a

Abstract

References

Cited By

Figures (4)

Tables (3)

Equations (2)

Metrics

Login or Create Account