Abstract

The surface roughnesses of fifteen well-characterized aluminum roughness standards were studied using spectroscopic ellipsometry in the spectral range from 300 to 650 nm at 70° angle of incidence. It was found that the measured ellipsometric parameters ψ and Δ qualitatively discriminated between the rms roughnesses of the specimens. The rms local surface slopes (tanβ) were also calculated from the measured ellipsometric parameters Δ and ψ using the theory of Ohlidal and Lukes. All the ellipsometric results were compared with those obtained from total integrated scattering measurements. Good qualitative agreement was found.

© 1985 Optical Society of America

Full Article  |  PDF Article
More Like This
Roughness measurements of Si and Al by variable angle spectroscopic ellipsometry

Julio R. Blanco and Patrick J. McMarr
Appl. Opt. 30(22) 3210-3220 (1991)

Ellipsometry of rough surfaces

T. V. Vorburger and K. C. Ludema
Appl. Opt. 19(4) 561-573 (1980)

Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry

Kyung Hoon Jun, Joong Hwan Kwak, and Koeng Su Lim
J. Opt. Soc. Am. A 20(6) 1060-1066 (2003)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription