Abstract

Experimental evidence of the formation of periodic structures during multipulse TEA CO2 laser irradiation of fused silica samples is reported. It is shown that the periodic structures formation is determined by the interference between incident and scattered waves, resulting in different values of both the vaporization velocity and the recoil pressure of the vapors back to the interaction surface.

© 1985 Optical Society of America

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  1. M. Sigrist, G. Kaech, F. K. Kneubuhl, “Formation of a Periodic Wave Structure on the Surface of a Solid by TEA CO2 Laser Pulses,” Appl. Phys. 2, 45 (1973).
    [Crossref]
  2. D. C. Emmony, R. P. Howson, L. J. Willis, “Laser Mirror Damage in Germanium at 10.6 μm,” Appl. Phys. Lett. 23, 598 (1973).
    [Crossref]
  3. D. C. Emmony, N. J. Phillips, J. H. Toyer, L. J. Willis, “The Topography of Laser-Irradiated Germanium,” J. Phys. D 8, 1472 (1975).
    [Crossref]
  4. G. H. Maracas, G. L. Harris, C. A. Lee, R. A. McFarlane, “On the Origin of Periodic Surface Structure of Laser-Annealed Semiconductors,” Appl. Phys. Lett. 33, 453 (1978).
    [Crossref]
  5. P. A. Temple, M. J. Soileau, “Polarization Charge Model for Laser-Induced Ripple Pattern in Dielectric Materials,” IEEE J. Quantum Electron, QE-17, 2067 (1981).
    [Crossref]
  6. A. V. Jain, V. N. Kulkarin, D. K. Sood, J. S. Uppal, “Periodic Surface Ripples in Laser-Treated Aluminium and their Use to Determine Absorbed Power,” J. Appl. Phys. 52, 4882 (1981).
    [Crossref]
  7. A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.
  8. F. Keilmann, Y. H. Bai, “Periodic Surface Structures Frozen into CO2 Laser-Melted Quartz,” Appl. Phys. A 29, 9 (1983).
    [Crossref]
  9. V. I. Konov, A. M. Prokhorov, V. A. Sichugov, V. N. Tokarev, N. I. Chapliev, “Vaporization Mechanism of the Periodic Structures Formation by the Laser Radiation Action onto the Surface of the Melted Quartz,” Preprint FIAN No. 122 (Moscow, 1983), in Russian.
  10. N. Tsukada, S. Sugato, H. Saitah, Y. Mita, “New Experimental Evidence of Surface Ripples on Gallium Arsenide in Laser Annealing,” Appl. Phys. Lett. 42, 424 (1983).
    [Crossref]
  11. V. N. Anisimov et al., “Laser-Induced Surface Periodic Structures,” Poverhnosti: Fizika, Himia i Mechanicá No. 7, 138 (1983), in Russian.
  12. V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).
  13. F. Keilmann, “Instability of Liquid Metal Surfaces under Intense Infrared Irradiation,” Phys. Rev. Lett. 51, 2097 (1983).
    [Crossref]
  14. J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel, “Laser-Induced Periodic Surface Structure. 1: Theory,” Phys. Rev. B27, 1141 (1983); J. F. Young, J. S. Preston, H. M. van Driel, J. E. Sipe, “Laser-Induced Periodic Surface Structure. II: Experiments on Ge, Si, Al, and Brass,” Phys. Rev. B27, 1155 (1983).
  15. V. I. Emelyanov, E. M. Zemekov, V. N. Seminogov, “Theory of Formation of Periodic Gratings by the Action of the Laser Radiation onto the Surface of Metals, Semiconductors and Dielectrics,” Kvantovaya Elektron. Moscow 10, 2389 (1983).
  16. V. I. Emelyanov, V. N. Seminogov, “Excitation of Coupled Capillary Waves, Diffracted Electromagnetic Waves and Surface Structures upon Exposure of Liquid Metals, Semiconductors, and Dielectrics to the High-Power Electromagnetic Radiation,” Kvantovaya Elektron. Moscow 11, 871 (1984).
  17. J. F. Young, J. E. Sipe, H. M. van Driel, “Laser-Induced Periodic Surface Structure. III: Fluence Regimes, the Role of Feedback, and Details of the Induced Topography in Germanium,” Phys. Rev. B 30, 2001 (1984).
    [Crossref]
  18. I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
    [Crossref]
  19. I. Ursu, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “On the Role of the Periodical Structures Induced by Powerful Laser Irradiation of Metallic Surfaces in the Energy Coupling Process,” Physich 124C (North-Holland, Amsterdam, 1985).
  20. A. M. Prokhorov, V. A. Batanov, F. V. Bunkin, V. B. Fedorov, “Metal Evaporation under Powerful Optical Radiation,” IEEE J. Quantum Electron. QE-9, 503 (1973).
    [Crossref]

1984 (3)

V. I. Emelyanov, V. N. Seminogov, “Excitation of Coupled Capillary Waves, Diffracted Electromagnetic Waves and Surface Structures upon Exposure of Liquid Metals, Semiconductors, and Dielectrics to the High-Power Electromagnetic Radiation,” Kvantovaya Elektron. Moscow 11, 871 (1984).

J. F. Young, J. E. Sipe, H. M. van Driel, “Laser-Induced Periodic Surface Structure. III: Fluence Regimes, the Role of Feedback, and Details of the Induced Topography in Germanium,” Phys. Rev. B 30, 2001 (1984).
[Crossref]

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

1983 (7)

F. Keilmann, Y. H. Bai, “Periodic Surface Structures Frozen into CO2 Laser-Melted Quartz,” Appl. Phys. A 29, 9 (1983).
[Crossref]

N. Tsukada, S. Sugato, H. Saitah, Y. Mita, “New Experimental Evidence of Surface Ripples on Gallium Arsenide in Laser Annealing,” Appl. Phys. Lett. 42, 424 (1983).
[Crossref]

V. N. Anisimov et al., “Laser-Induced Surface Periodic Structures,” Poverhnosti: Fizika, Himia i Mechanicá No. 7, 138 (1983), in Russian.

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).

F. Keilmann, “Instability of Liquid Metal Surfaces under Intense Infrared Irradiation,” Phys. Rev. Lett. 51, 2097 (1983).
[Crossref]

J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel, “Laser-Induced Periodic Surface Structure. 1: Theory,” Phys. Rev. B27, 1141 (1983); J. F. Young, J. S. Preston, H. M. van Driel, J. E. Sipe, “Laser-Induced Periodic Surface Structure. II: Experiments on Ge, Si, Al, and Brass,” Phys. Rev. B27, 1155 (1983).

V. I. Emelyanov, E. M. Zemekov, V. N. Seminogov, “Theory of Formation of Periodic Gratings by the Action of the Laser Radiation onto the Surface of Metals, Semiconductors and Dielectrics,” Kvantovaya Elektron. Moscow 10, 2389 (1983).

1982 (1)

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

1981 (2)

P. A. Temple, M. J. Soileau, “Polarization Charge Model for Laser-Induced Ripple Pattern in Dielectric Materials,” IEEE J. Quantum Electron, QE-17, 2067 (1981).
[Crossref]

A. V. Jain, V. N. Kulkarin, D. K. Sood, J. S. Uppal, “Periodic Surface Ripples in Laser-Treated Aluminium and their Use to Determine Absorbed Power,” J. Appl. Phys. 52, 4882 (1981).
[Crossref]

1978 (1)

G. H. Maracas, G. L. Harris, C. A. Lee, R. A. McFarlane, “On the Origin of Periodic Surface Structure of Laser-Annealed Semiconductors,” Appl. Phys. Lett. 33, 453 (1978).
[Crossref]

1975 (1)

D. C. Emmony, N. J. Phillips, J. H. Toyer, L. J. Willis, “The Topography of Laser-Irradiated Germanium,” J. Phys. D 8, 1472 (1975).
[Crossref]

1973 (3)

M. Sigrist, G. Kaech, F. K. Kneubuhl, “Formation of a Periodic Wave Structure on the Surface of a Solid by TEA CO2 Laser Pulses,” Appl. Phys. 2, 45 (1973).
[Crossref]

D. C. Emmony, R. P. Howson, L. J. Willis, “Laser Mirror Damage in Germanium at 10.6 μm,” Appl. Phys. Lett. 23, 598 (1973).
[Crossref]

A. M. Prokhorov, V. A. Batanov, F. V. Bunkin, V. B. Fedorov, “Metal Evaporation under Powerful Optical Radiation,” IEEE J. Quantum Electron. QE-9, 503 (1973).
[Crossref]

Anisimov, V. N.

V. N. Anisimov et al., “Laser-Induced Surface Periodic Structures,” Poverhnosti: Fizika, Himia i Mechanicá No. 7, 138 (1983), in Russian.

Bai, Y. H.

F. Keilmann, Y. H. Bai, “Periodic Surface Structures Frozen into CO2 Laser-Melted Quartz,” Appl. Phys. A 29, 9 (1983).
[Crossref]

Batanov, V. A.

A. M. Prokhorov, V. A. Batanov, F. V. Bunkin, V. B. Fedorov, “Metal Evaporation under Powerful Optical Radiation,” IEEE J. Quantum Electron. QE-9, 503 (1973).
[Crossref]

Bonch-Bruevich, A. M.

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

Bunkin, F. V.

A. M. Prokhorov, V. A. Batanov, F. V. Bunkin, V. B. Fedorov, “Metal Evaporation under Powerful Optical Radiation,” IEEE J. Quantum Electron. QE-9, 503 (1973).
[Crossref]

Chapliev, N. I.

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, V. N. Tokarev, N. I. Chapliev, “Vaporization Mechanism of the Periodic Structures Formation by the Laser Radiation Action onto the Surface of the Melted Quartz,” Preprint FIAN No. 122 (Moscow, 1983), in Russian.

Emelyanov, V. I.

V. I. Emelyanov, V. N. Seminogov, “Excitation of Coupled Capillary Waves, Diffracted Electromagnetic Waves and Surface Structures upon Exposure of Liquid Metals, Semiconductors, and Dielectrics to the High-Power Electromagnetic Radiation,” Kvantovaya Elektron. Moscow 11, 871 (1984).

V. I. Emelyanov, E. M. Zemekov, V. N. Seminogov, “Theory of Formation of Periodic Gratings by the Action of the Laser Radiation onto the Surface of Metals, Semiconductors and Dielectrics,” Kvantovaya Elektron. Moscow 10, 2389 (1983).

Emmony, D. C.

D. C. Emmony, N. J. Phillips, J. H. Toyer, L. J. Willis, “The Topography of Laser-Irradiated Germanium,” J. Phys. D 8, 1472 (1975).
[Crossref]

D. C. Emmony, R. P. Howson, L. J. Willis, “Laser Mirror Damage in Germanium at 10.6 μm,” Appl. Phys. Lett. 23, 598 (1973).
[Crossref]

Fedorov, V. B.

A. M. Prokhorov, V. A. Batanov, F. V. Bunkin, V. B. Fedorov, “Metal Evaporation under Powerful Optical Radiation,” IEEE J. Quantum Electron. QE-9, 503 (1973).
[Crossref]

Harris, G. L.

G. H. Maracas, G. L. Harris, C. A. Lee, R. A. McFarlane, “On the Origin of Periodic Surface Structure of Laser-Annealed Semiconductors,” Appl. Phys. Lett. 33, 453 (1978).
[Crossref]

Howson, R. P.

D. C. Emmony, R. P. Howson, L. J. Willis, “Laser Mirror Damage in Germanium at 10.6 μm,” Appl. Phys. Lett. 23, 598 (1973).
[Crossref]

Jain, A. V.

A. V. Jain, V. N. Kulkarin, D. K. Sood, J. S. Uppal, “Periodic Surface Ripples in Laser-Treated Aluminium and their Use to Determine Absorbed Power,” J. Appl. Phys. 52, 4882 (1981).
[Crossref]

Kaech, G.

M. Sigrist, G. Kaech, F. K. Kneubuhl, “Formation of a Periodic Wave Structure on the Surface of a Solid by TEA CO2 Laser Pulses,” Appl. Phys. 2, 45 (1973).
[Crossref]

Keilmann, F.

F. Keilmann, Y. H. Bai, “Periodic Surface Structures Frozen into CO2 Laser-Melted Quartz,” Appl. Phys. A 29, 9 (1983).
[Crossref]

F. Keilmann, “Instability of Liquid Metal Surfaces under Intense Infrared Irradiation,” Phys. Rev. Lett. 51, 2097 (1983).
[Crossref]

Kneubuhl, F. K.

M. Sigrist, G. Kaech, F. K. Kneubuhl, “Formation of a Periodic Wave Structure on the Surface of a Solid by TEA CO2 Laser Pulses,” Appl. Phys. 2, 45 (1973).
[Crossref]

Kochenghina, M. K.

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

Konov, V. I.

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).

I. Ursu, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “On the Role of the Periodical Structures Induced by Powerful Laser Irradiation of Metallic Surfaces in the Energy Coupling Process,” Physich 124C (North-Holland, Amsterdam, 1985).

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, V. N. Tokarev, N. I. Chapliev, “Vaporization Mechanism of the Periodic Structures Formation by the Laser Radiation Action onto the Surface of the Melted Quartz,” Preprint FIAN No. 122 (Moscow, 1983), in Russian.

Kulkarin, V. N.

A. V. Jain, V. N. Kulkarin, D. K. Sood, J. S. Uppal, “Periodic Surface Ripples in Laser-Treated Aluminium and their Use to Determine Absorbed Power,” J. Appl. Phys. 52, 4882 (1981).
[Crossref]

Lee, C. A.

G. H. Maracas, G. L. Harris, C. A. Lee, R. A. McFarlane, “On the Origin of Periodic Surface Structure of Laser-Annealed Semiconductors,” Appl. Phys. Lett. 33, 453 (1978).
[Crossref]

Libenson, M. N.

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

Makyn, V. S.

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

Maracas, G. H.

G. H. Maracas, G. L. Harris, C. A. Lee, R. A. McFarlane, “On the Origin of Periodic Surface Structure of Laser-Annealed Semiconductors,” Appl. Phys. Lett. 33, 453 (1978).
[Crossref]

McFarlane, R. A.

G. H. Maracas, G. L. Harris, C. A. Lee, R. A. McFarlane, “On the Origin of Periodic Surface Structure of Laser-Annealed Semiconductors,” Appl. Phys. Lett. 33, 453 (1978).
[Crossref]

Mihailescu, I. N.

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

I. Ursu, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “On the Role of the Periodical Structures Induced by Powerful Laser Irradiation of Metallic Surfaces in the Energy Coupling Process,” Physich 124C (North-Holland, Amsterdam, 1985).

Mita, Y.

N. Tsukada, S. Sugato, H. Saitah, Y. Mita, “New Experimental Evidence of Surface Ripples on Gallium Arsenide in Laser Annealing,” Appl. Phys. Lett. 42, 424 (1983).
[Crossref]

Phillips, N. J.

D. C. Emmony, N. J. Phillips, J. H. Toyer, L. J. Willis, “The Topography of Laser-Irradiated Germanium,” J. Phys. D 8, 1472 (1975).
[Crossref]

Popa, A.

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

Preston, J. S.

J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel, “Laser-Induced Periodic Surface Structure. 1: Theory,” Phys. Rev. B27, 1141 (1983); J. F. Young, J. S. Preston, H. M. van Driel, J. E. Sipe, “Laser-Induced Periodic Surface Structure. II: Experiments on Ge, Si, Al, and Brass,” Phys. Rev. B27, 1155 (1983).

Prokhorov, A. M.

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).

A. M. Prokhorov, V. A. Batanov, F. V. Bunkin, V. B. Fedorov, “Metal Evaporation under Powerful Optical Radiation,” IEEE J. Quantum Electron. QE-9, 503 (1973).
[Crossref]

I. Ursu, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “On the Role of the Periodical Structures Induced by Powerful Laser Irradiation of Metallic Surfaces in the Energy Coupling Process,” Physich 124C (North-Holland, Amsterdam, 1985).

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, V. N. Tokarev, N. I. Chapliev, “Vaporization Mechanism of the Periodic Structures Formation by the Laser Radiation Action onto the Surface of the Melted Quartz,” Preprint FIAN No. 122 (Moscow, 1983), in Russian.

Pudkov, S. D.

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

Saitah, H.

N. Tsukada, S. Sugato, H. Saitah, Y. Mita, “New Experimental Evidence of Surface Ripples on Gallium Arsenide in Laser Annealing,” Appl. Phys. Lett. 42, 424 (1983).
[Crossref]

Seminogov, V. N.

V. I. Emelyanov, V. N. Seminogov, “Excitation of Coupled Capillary Waves, Diffracted Electromagnetic Waves and Surface Structures upon Exposure of Liquid Metals, Semiconductors, and Dielectrics to the High-Power Electromagnetic Radiation,” Kvantovaya Elektron. Moscow 11, 871 (1984).

V. I. Emelyanov, E. M. Zemekov, V. N. Seminogov, “Theory of Formation of Periodic Gratings by the Action of the Laser Radiation onto the Surface of Metals, Semiconductors and Dielectrics,” Kvantovaya Elektron. Moscow 10, 2389 (1983).

Sichugov, V. A.

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, V. N. Tokarev, N. I. Chapliev, “Vaporization Mechanism of the Periodic Structures Formation by the Laser Radiation Action onto the Surface of the Melted Quartz,” Preprint FIAN No. 122 (Moscow, 1983), in Russian.

Sigrist, M.

M. Sigrist, G. Kaech, F. K. Kneubuhl, “Formation of a Periodic Wave Structure on the Surface of a Solid by TEA CO2 Laser Pulses,” Appl. Phys. 2, 45 (1973).
[Crossref]

Sipe, J. E.

J. F. Young, J. E. Sipe, H. M. van Driel, “Laser-Induced Periodic Surface Structure. III: Fluence Regimes, the Role of Feedback, and Details of the Induced Topography in Germanium,” Phys. Rev. B 30, 2001 (1984).
[Crossref]

J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel, “Laser-Induced Periodic Surface Structure. 1: Theory,” Phys. Rev. B27, 1141 (1983); J. F. Young, J. S. Preston, H. M. van Driel, J. E. Sipe, “Laser-Induced Periodic Surface Structure. II: Experiments on Ge, Si, Al, and Brass,” Phys. Rev. B27, 1155 (1983).

Soileau, M. J.

P. A. Temple, M. J. Soileau, “Polarization Charge Model for Laser-Induced Ripple Pattern in Dielectric Materials,” IEEE J. Quantum Electron, QE-17, 2067 (1981).
[Crossref]

Sood, D. K.

A. V. Jain, V. N. Kulkarin, D. K. Sood, J. S. Uppal, “Periodic Surface Ripples in Laser-Treated Aluminium and their Use to Determine Absorbed Power,” J. Appl. Phys. 52, 4882 (1981).
[Crossref]

Sugato, S.

N. Tsukada, S. Sugato, H. Saitah, Y. Mita, “New Experimental Evidence of Surface Ripples on Gallium Arsenide in Laser Annealing,” Appl. Phys. Lett. 42, 424 (1983).
[Crossref]

Temple, P. A.

P. A. Temple, M. J. Soileau, “Polarization Charge Model for Laser-Induced Ripple Pattern in Dielectric Materials,” IEEE J. Quantum Electron, QE-17, 2067 (1981).
[Crossref]

Tischenko, A. V.

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).

Tokarev, V. N.

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).

I. Ursu, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “On the Role of the Periodical Structures Induced by Powerful Laser Irradiation of Metallic Surfaces in the Energy Coupling Process,” Physich 124C (North-Holland, Amsterdam, 1985).

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, V. N. Tokarev, N. I. Chapliev, “Vaporization Mechanism of the Periodic Structures Formation by the Laser Radiation Action onto the Surface of the Melted Quartz,” Preprint FIAN No. 122 (Moscow, 1983), in Russian.

Toyer, J. H.

D. C. Emmony, N. J. Phillips, J. H. Toyer, L. J. Willis, “The Topography of Laser-Irradiated Germanium,” J. Phys. D 8, 1472 (1975).
[Crossref]

Trubaev, V. V.

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

Tsukada, N.

N. Tsukada, S. Sugato, H. Saitah, Y. Mita, “New Experimental Evidence of Surface Ripples on Gallium Arsenide in Laser Annealing,” Appl. Phys. Lett. 42, 424 (1983).
[Crossref]

Uppal, J. S.

A. V. Jain, V. N. Kulkarin, D. K. Sood, J. S. Uppal, “Periodic Surface Ripples in Laser-Treated Aluminium and their Use to Determine Absorbed Power,” J. Appl. Phys. 52, 4882 (1981).
[Crossref]

Ursu, I.

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

I. Ursu, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “On the Role of the Periodical Structures Induced by Powerful Laser Irradiation of Metallic Surfaces in the Energy Coupling Process,” Physich 124C (North-Holland, Amsterdam, 1985).

van Driel, H. M.

J. F. Young, J. E. Sipe, H. M. van Driel, “Laser-Induced Periodic Surface Structure. III: Fluence Regimes, the Role of Feedback, and Details of the Induced Topography in Germanium,” Phys. Rev. B 30, 2001 (1984).
[Crossref]

J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel, “Laser-Induced Periodic Surface Structure. 1: Theory,” Phys. Rev. B27, 1141 (1983); J. F. Young, J. S. Preston, H. M. van Driel, J. E. Sipe, “Laser-Induced Periodic Surface Structure. II: Experiments on Ge, Si, Al, and Brass,” Phys. Rev. B27, 1155 (1983).

Willis, L. J.

D. C. Emmony, N. J. Phillips, J. H. Toyer, L. J. Willis, “The Topography of Laser-Irradiated Germanium,” J. Phys. D 8, 1472 (1975).
[Crossref]

D. C. Emmony, R. P. Howson, L. J. Willis, “Laser Mirror Damage in Germanium at 10.6 μm,” Appl. Phys. Lett. 23, 598 (1973).
[Crossref]

Young, J. F.

J. F. Young, J. E. Sipe, H. M. van Driel, “Laser-Induced Periodic Surface Structure. III: Fluence Regimes, the Role of Feedback, and Details of the Induced Topography in Germanium,” Phys. Rev. B 30, 2001 (1984).
[Crossref]

J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel, “Laser-Induced Periodic Surface Structure. 1: Theory,” Phys. Rev. B27, 1141 (1983); J. F. Young, J. S. Preston, H. M. van Driel, J. E. Sipe, “Laser-Induced Periodic Surface Structure. II: Experiments on Ge, Si, Al, and Brass,” Phys. Rev. B27, 1155 (1983).

Zemekov, E. M.

V. I. Emelyanov, E. M. Zemekov, V. N. Seminogov, “Theory of Formation of Periodic Gratings by the Action of the Laser Radiation onto the Surface of Metals, Semiconductors and Dielectrics,” Kvantovaya Elektron. Moscow 10, 2389 (1983).

Appl. Phys. (1)

M. Sigrist, G. Kaech, F. K. Kneubuhl, “Formation of a Periodic Wave Structure on the Surface of a Solid by TEA CO2 Laser Pulses,” Appl. Phys. 2, 45 (1973).
[Crossref]

Appl. Phys. A (1)

F. Keilmann, Y. H. Bai, “Periodic Surface Structures Frozen into CO2 Laser-Melted Quartz,” Appl. Phys. A 29, 9 (1983).
[Crossref]

Appl. Phys. Lett. (4)

N. Tsukada, S. Sugato, H. Saitah, Y. Mita, “New Experimental Evidence of Surface Ripples on Gallium Arsenide in Laser Annealing,” Appl. Phys. Lett. 42, 424 (1983).
[Crossref]

D. C. Emmony, R. P. Howson, L. J. Willis, “Laser Mirror Damage in Germanium at 10.6 μm,” Appl. Phys. Lett. 23, 598 (1973).
[Crossref]

G. H. Maracas, G. L. Harris, C. A. Lee, R. A. McFarlane, “On the Origin of Periodic Surface Structure of Laser-Annealed Semiconductors,” Appl. Phys. Lett. 33, 453 (1978).
[Crossref]

I. Ursu, I. N. Mihailescu, A. Popa, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “CO2-Laser Radiation Absorption by Metal Gratings,” Appl. Phys. Lett. 45, 365 (1984).
[Crossref]

IEEE J. Quantum Electron (1)

P. A. Temple, M. J. Soileau, “Polarization Charge Model for Laser-Induced Ripple Pattern in Dielectric Materials,” IEEE J. Quantum Electron, QE-17, 2067 (1981).
[Crossref]

IEEE J. Quantum Electron. (1)

A. M. Prokhorov, V. A. Batanov, F. V. Bunkin, V. B. Fedorov, “Metal Evaporation under Powerful Optical Radiation,” IEEE J. Quantum Electron. QE-9, 503 (1973).
[Crossref]

Izv. Akad. Nauk SSSR Ser. Fiz. (1)

A. M. Bonch-Bruevich, M. K. Kochenghina, M. N. Libenson, V. S. Makyn, S. D. Pudkov, V. V. Trubaev, “Excitation of Surface and Wave Modes by Intense Laser Radiation and their Influence on the Character of the Surface Damage of the Condensed Media,” Izv. Akad. Nauk SSSR Ser. Fiz. 46, 1186 (1982), in Russian.

J. Appl. Phys. (1)

A. V. Jain, V. N. Kulkarin, D. K. Sood, J. S. Uppal, “Periodic Surface Ripples in Laser-Treated Aluminium and their Use to Determine Absorbed Power,” J. Appl. Phys. 52, 4882 (1981).
[Crossref]

J. Phys. D (1)

D. C. Emmony, N. J. Phillips, J. H. Toyer, L. J. Willis, “The Topography of Laser-Irradiated Germanium,” J. Phys. D 8, 1472 (1975).
[Crossref]

Kvantovaya Elektron. Moscow (2)

V. I. Emelyanov, E. M. Zemekov, V. N. Seminogov, “Theory of Formation of Periodic Gratings by the Action of the Laser Radiation onto the Surface of Metals, Semiconductors and Dielectrics,” Kvantovaya Elektron. Moscow 10, 2389 (1983).

V. I. Emelyanov, V. N. Seminogov, “Excitation of Coupled Capillary Waves, Diffracted Electromagnetic Waves and Surface Structures upon Exposure of Liquid Metals, Semiconductors, and Dielectrics to the High-Power Electromagnetic Radiation,” Kvantovaya Elektron. Moscow 11, 871 (1984).

Phys. Rev. (1)

J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel, “Laser-Induced Periodic Surface Structure. 1: Theory,” Phys. Rev. B27, 1141 (1983); J. F. Young, J. S. Preston, H. M. van Driel, J. E. Sipe, “Laser-Induced Periodic Surface Structure. II: Experiments on Ge, Si, Al, and Brass,” Phys. Rev. B27, 1155 (1983).

Phys. Rev. B (1)

J. F. Young, J. E. Sipe, H. M. van Driel, “Laser-Induced Periodic Surface Structure. III: Fluence Regimes, the Role of Feedback, and Details of the Induced Topography in Germanium,” Phys. Rev. B 30, 2001 (1984).
[Crossref]

Phys. Rev. Lett. (1)

F. Keilmann, “Instability of Liquid Metal Surfaces under Intense Infrared Irradiation,” Phys. Rev. Lett. 51, 2097 (1983).
[Crossref]

Poverhnosti: Fizika, Himia i Mechanicá (1)

V. N. Anisimov et al., “Laser-Induced Surface Periodic Structures,” Poverhnosti: Fizika, Himia i Mechanicá No. 7, 138 (1983), in Russian.

Zh. Tekh. Fiz (1)

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, A. V. Tischenko, V. N. Tokarev, “Time and Space Evolution of the Periodic Structures Induced onto the Surface of Laser-Irradiated Solid Samples,” Zh. Tekh. Fiz 53, 2238 (1983).

Other (2)

V. I. Konov, A. M. Prokhorov, V. A. Sichugov, V. N. Tokarev, N. I. Chapliev, “Vaporization Mechanism of the Periodic Structures Formation by the Laser Radiation Action onto the Surface of the Melted Quartz,” Preprint FIAN No. 122 (Moscow, 1983), in Russian.

I. Ursu, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, “On the Role of the Periodical Structures Induced by Powerful Laser Irradiation of Metallic Surfaces in the Energy Coupling Process,” Physich 124C (North-Holland, Amsterdam, 1985).

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Figures (5)

Fig. 1
Fig. 1

Scanning electron micrographs illustrating the PS evolution with the number of laser pulses N. Irradiation conditions: TM polarization, incidence angle φ ≃ 0°: (a) N = 7; (b) N = 15; (c) N = 30; (d) N = 60.

Fig. 2
Fig. 2

Shape evolution of PS as revealed from the edges of the replica cuttings by scanning and optical micrographs for (a),(b) N = 10, φ = 0°, TM polarization; (c),(d) N = 60, φ = 0°, TM polarization; (e),(f) N = 60; φ = 20°, TM polarization.

Fig. 3
Fig. 3

(a) Optical micrograph illustrating the PS appearance in side a crater. Irradiation conditions: N = 30, φ = 0°, TM polarization. (b) Scheme showing the PS formation due to the melted material dislocation only (from bottom to top of the PS grooves).

Fig. 4
Fig. 4

Scheme showing the PS formation due to the material vaporization only.

Fig. 5
Fig. 5

Scheme showing the melt dislocation from bottom to top of the PS grooves under action of the recoil pressure of the vapor back to cold and hot zones, respectively, on the sample surfaces.

Tables (1)

Tables Icon

Table I Quantitative Description of the PS Profile Revealed by Determinations Performed on Micrographs Corresponding to Different Irradiation Conditions

Metrics