Abstract

The level method monitoring technology which is suitable for periodic multilayers is studied theoretically as well as experimentally. Experimental results are given for three multilayer systems.

© 1985 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optical thickness monitoring sensitivity improvement using graphical methods

Ronald R. Willey
Appl. Opt. 26(4) 729-737 (1987)

Optical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance

Byung Jin Chun, Chang Kwon Hwangbo, and Jong Sup Kim
Opt. Express 14(6) 2473-2480 (2006)

Advanced broadband monitoring for thin film deposition through equivalent optical admittance loci observation

Kai Wu, Cheng-Chung Lee, and Tzu-Ling Ni
Opt. Express 20(4) 3883-3889 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (8)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription