Abstract

A scanning monochromator system for the monitoring of thin-film deposition in a box coater is described. The system employs data from both a quartz crystal oscillator and a wideband transmission spectrometer. The spectrometer uses a holographic grating as its dispersive element and a CCD array to collect the data. All data are sent to a microcomputer where the information is displayed, stored, and analyzed. Several applications, including measurement of optical constants of inhomogeneous films and characterization of moisture adsorption, are discussed.

© 1985 Optical Society of America

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References

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  1. H. A. Macleod, “Turning Value Monitoring of Narrow-Band All-Dielectric Thin Film Optical Filters,” Opt. Acta 19, 1 (1972).
    [CrossRef]
  2. P. Bousquet, E. Pelletier, “Optical Thin Film Monitoring— Recent Advances and Limitations,” Thin Solid Films 77, 165 (1981).
    [CrossRef]
  3. B. Vidal, A. Fornier, E. Pelletier, “Wideband Optical Monitoring of Nonquarterwavce Multilayer Filters,” Appl. Opt. 18, 3851 (1979).
    [PubMed]
  4. J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).
  5. S. G. Saxe et al., “Ion Bombardment-Induced Retarded Moisture Adsorption in Optical Thin Films,” Appl. Opt. 23, 3633 (1984).
    [CrossRef] [PubMed]
  6. B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

1984 (2)

B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

S. G. Saxe et al., “Ion Bombardment-Induced Retarded Moisture Adsorption in Optical Thin Films,” Appl. Opt. 23, 3633 (1984).
[CrossRef] [PubMed]

1981 (1)

P. Bousquet, E. Pelletier, “Optical Thin Film Monitoring— Recent Advances and Limitations,” Thin Solid Films 77, 165 (1981).
[CrossRef]

1980 (1)

J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).

1979 (1)

1972 (1)

H. A. Macleod, “Turning Value Monitoring of Narrow-Band All-Dielectric Thin Film Optical Filters,” Opt. Acta 19, 1 (1972).
[CrossRef]

Bousquet, P.

P. Bousquet, E. Pelletier, “Optical Thin Film Monitoring— Recent Advances and Limitations,” Thin Solid Films 77, 165 (1981).
[CrossRef]

Bovard, B.

B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

Flamand, J.

J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).

Fornier, A.

Laude, J. P.

J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).

Lerner, J. M.

J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).

Macleod, H. A.

B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

H. A. Macleod, “Turning Value Monitoring of Narrow-Band All-Dielectric Thin Film Optical Filters,” Opt. Acta 19, 1 (1972).
[CrossRef]

Messerly, M. J.

B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

Passereau, G.

J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).

Pelletier, E.

P. Bousquet, E. Pelletier, “Optical Thin Film Monitoring— Recent Advances and Limitations,” Thin Solid Films 77, 165 (1981).
[CrossRef]

B. Vidal, A. Fornier, E. Pelletier, “Wideband Optical Monitoring of Nonquarterwavce Multilayer Filters,” Appl. Opt. 18, 3851 (1979).
[PubMed]

Saxe, S. G.

S. G. Saxe et al., “Ion Bombardment-Induced Retarded Moisture Adsorption in Optical Thin Films,” Appl. Opt. 23, 3633 (1984).
[CrossRef] [PubMed]

B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

Thevenon, A.

J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).

Van Milligen, F. J.

B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

Vidal, B.

Appl. Opt. (2)

J. Opt. Soc. Am. A (1)

B. Bovard, S. G. Saxe, M. J. Messerly, F. J. Van Milligen, H. A. Macleod, “Techniques for Thin-Film Optical Constant Derivation from In Situ Transmission Measurements,” J. Opt. Soc. Am. A 1, 1279 (1984).

Opt. Acta (1)

H. A. Macleod, “Turning Value Monitoring of Narrow-Band All-Dielectric Thin Film Optical Filters,” Opt. Acta 19, 1 (1972).
[CrossRef]

Proc. Soc. Photo-Opt. Instrum. Eng. (1)

J. M. Lerner, J. Flamand, J. P. Laude, G. Passereau, A. Thevenon, “Diffraction Gratings Ruled and Holographic—A Review,” Proc. Soc. Photo-Opt. Instrum. Eng. 240, 82 (1980).

Thin Solid Films (1)

P. Bousquet, E. Pelletier, “Optical Thin Film Monitoring— Recent Advances and Limitations,” Thin Solid Films 77, 165 (1981).
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

Scanning monochromator flow diagram.

Fig. 2
Fig. 2

Spectral profiles of (a) tungsten–halogen lamp, (b) xenon-arc lamp.

Fig. 3
Fig. 3

Appearance of scanning monochromator system.

Fig. 4
Fig. 4

Top view of scanning monochromator.

Fig. 5
Fig. 5

Flow chart of computer data handling program.

Fig. 6
Fig. 6

Example of water adsorption in a TiO2, SiO2 Fabry-Perot filter.

Fig. 7
Fig. 7

Variation of optical constants of TiO2 as the film is being deposited; upper curve corresponds to n, lower curve to k.

Tables (1)

Tables Icon

Table I System Performance

Metrics