Abstract

This paper describes a technique that combines ideas of phase shifting interferometry (PSI) and two-wavelength interferometry (TWLI) to extend the phase measurement range of conventional single-wavelength PSI. To verify theoretical predictions, experiments have been performed using a solid-state linear detector array to measure 1-D surface heights. Problems associated with TWLPSI and the experimental setup are discussed. To test the capability of the TWLPSI, a very fine fringe pattern was used to illuminate a 1024 element detector array. Without temporal averaging, the repeatability of measuring a surface having a sag of ~100 μm is better than 25-Å (0.0025%) rms.

© 1984 Optical Society of America

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