Layered synthetic microstructure technology considerations for the extreme ultraviolet

Change in Reflectance at Various Wavelengths for a Pt–Si LSM over a 10-Month Time Period.

*  ${\frac{\mathrm{\Delta }\text{R}}{\text{R}}}_{\text{INITIAL}}$ (%) AT THE END OF EVALUATION PERIOD

Change in Reflectance at Various Wavelengths for a Five-Layer Ir–Si LSM over a 10-Month Time Period.

*  ${\frac{\mathrm{\Delta }\text{R}}{\text{R}}}_{\text{INITIAL}}$ (%) AT THE END OF EVALUATION PERIOD

Absolute Efficiency of a (5000 lines/mm) Plane Holographic Grating: Ir Coatings and Ir–Si LSM Coating.

Table I

Change in Reflectance at Various Wavelengths for a Pt–Si LSM over a 10-Month Time Period.

*  ${\frac{\mathrm{\Delta }\text{R}}{\text{R}}}_{\text{INITIAL}}$ (%) AT THE END OF EVALUATION PERIOD

Table II

Change in Reflectance at Various Wavelengths for a Five-Layer Ir–Si LSM over a 10-Month Time Period.

*  ${\frac{\mathrm{\Delta }\text{R}}{\text{R}}}_{\text{INITIAL}}$ (%) AT THE END OF EVALUATION PERIOD

Table III

Absolute Efficiency of a (5000 lines/mm) Plane Holographic Grating: Ir Coatings and Ir–Si LSM Coating.