Abstract

The performance of layered synthetic microstructures (LSMs) in the extreme ultraviolet (EUV), particularly in the 300-Å spectral region, has been evaluated. Representative designs were analyzed, and experimental mirror coatings were produced. Pt–Si and Ir–Si combinations clearly demonstrate that the enhancement can be realized over a limited bandwidth of 75 Å. Preliminary results for the Ir–Si combination on a diffraction grating indicate that LSMs enhance grating efficiencies in the EUV by a factor of ~3.

© 1984 Optical Society of America

Full Article  |  PDF Article
More Like This
Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolet: theory and predicted performance

J. H. Underwood and T. W. Barbee
Appl. Opt. 20(17) 3027-3034 (1981)

Optimization of layered synthetic microstructures for narrowband reflectivity at soft x-ray and EUV wavelengths

John F. Meekins, Raymond G. Cruddace, and Herbert Gursky
Appl. Opt. 25(16) 2757-2763 (1986)

Extreme ultraviolet performance of a multilayer coated high density toroidal grating

Roger J. Thomas, Ritva A. M. Keski-Kuha, Werner M. Neupert, Charles E. Condor, and Jeffrey S. Gum
Appl. Opt. 30(16) 2245-2251 (1991)

View More...

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription