Abstract

In this paper we describe an optical scanning microscope (MOB) which explores step by step the surface of photodiodes of small areas used for optical communications. Our technique is well suited for the digitalization of the photocurrent and relevant parameters. The apparatus and numerical data processing are described. Experimental results are presented in the form of tridimensional maps. The technique is applied to germanium avalanche photodiodes and silicon solar cells. Small inhomogeneities of active surfaces are displayed.

© 1984 Optical Society of America

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