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  1. R. H. Müller, “Definitions and Conventions in Ellipsometry,” Surface Sci. 16, 14 (1969).
    [Crossref]
  2. J. M. Bennett, H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll, W. Vaughan, Eds. (McGraw-Hill, New York, 1978), Chap. 10.
  3. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  4. Any textbook on thin-film optics, for example, P.S. Heavens, Optical Properties of Thin Films (Dover, New York, 1965); A. Vasicek, Optics of Thin Films (North-Holland, Amsterdam, 1960); H. A. Macleod, Thin-Film Optical Filters (Elsevier, New York, 1969); M. Born, E. Wolf, Principles of Optics (Pergamon, London, 1975); P. H. Berning, “Theory and Calculations of Optical Thin films,” Phys. Thin Films 1, 69 (1963).

1969 (1)

R. H. Müller, “Definitions and Conventions in Ellipsometry,” Surface Sci. 16, 14 (1969).
[Crossref]

Azzam, R. M. A.

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

Bashara, N. M.

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

Bennett, H. E.

J. M. Bennett, H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll, W. Vaughan, Eds. (McGraw-Hill, New York, 1978), Chap. 10.

Bennett, J. M.

J. M. Bennett, H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll, W. Vaughan, Eds. (McGraw-Hill, New York, 1978), Chap. 10.

Heavens, P.S.

Any textbook on thin-film optics, for example, P.S. Heavens, Optical Properties of Thin Films (Dover, New York, 1965); A. Vasicek, Optics of Thin Films (North-Holland, Amsterdam, 1960); H. A. Macleod, Thin-Film Optical Filters (Elsevier, New York, 1969); M. Born, E. Wolf, Principles of Optics (Pergamon, London, 1975); P. H. Berning, “Theory and Calculations of Optical Thin films,” Phys. Thin Films 1, 69 (1963).

Müller, R. H.

R. H. Müller, “Definitions and Conventions in Ellipsometry,” Surface Sci. 16, 14 (1969).
[Crossref]

Surface Sci. (1)

R. H. Müller, “Definitions and Conventions in Ellipsometry,” Surface Sci. 16, 14 (1969).
[Crossref]

Other (3)

J. M. Bennett, H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll, W. Vaughan, Eds. (McGraw-Hill, New York, 1978), Chap. 10.

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

Any textbook on thin-film optics, for example, P.S. Heavens, Optical Properties of Thin Films (Dover, New York, 1965); A. Vasicek, Optics of Thin Films (North-Holland, Amsterdam, 1960); H. A. Macleod, Thin-Film Optical Filters (Elsevier, New York, 1969); M. Born, E. Wolf, Principles of Optics (Pergamon, London, 1975); P. H. Berning, “Theory and Calculations of Optical Thin films,” Phys. Thin Films 1, 69 (1963).

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Figures (1)

Fig. 1
Fig. 1

Phase retardation ϕpϕs between p-and s-polarized light which is reflected from a thin film of index nF = 2.05, incident medium with np = 1.509, and incidence angle α = 45° vs the normalized optical thickness of the film calculated on a digital computer. The full curve is for c1 = c2 = +1, the dashed curve for c1 = +1, c2 = −1. The curves for c1 = −1 are obtained by a shift of 180° in the phase retardation.

Equations (10)

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r s = n 1 cos α 1 - n 2 cos α 2 n 1 cos α 1 + n 2 cos α 2 ,
r p = c 1 n 1 cos α 2 - n 2 cos α 1 n 1 cos α 2 + n 2 cos α 1
n sin α = n 0 sin α 0 ;
cos α = 1 - n 0 2 sin 2 α 0 n 2 .
n ˜ = n + c 2 i k ,
r f = r t + r b exp ( c 2 · 2 i β ) 1 + r t r b exp ( c 2 · 2 i β ) ,
β = 2 π λ 0 n d cos α
β = 2 π λ 0 d n 2 - n 0 2 sin 2 α 0 .
M = ( cos β - c 2 i p sin β - c 2 i p sin β cos β ) ,
lim 0 - 1 - i = - i ,

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